Felix Kozakevich

Inventor

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Details

Work History

Patent OwnerApplications FiledYear
LAM RESEARCH CORPORATION
1
4
1
1
6
5
6
2
4
2
2
2
5
1
1
1996
1997
1999
2001
2003
2004
2005
2006
2008
2009
2010
2012
2015
2016
2017
LAM RESEARCH CROPORATION
2
2004

Inventor Addresses

AddressDuration
Sunnyvale, CAJun 15, 99 - Dec 25, 08
Sunnyvale, CA, USFeb 24, 05 - Mar 18, 25

Technology Profile

Technology Matters
A45B: WALKING STICKS 2
B05D: PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 1
B08B: CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 2

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
122550522025Process control for ion energy delivery using multiple generators and phase control0
2025/0087,4582025TUNING VOLTAGE SETPOINT IN A PULSED RF SIGNAL FOR A TUNABLE EDGE SHEATH SYSTEM0
121835442024Tuning voltage setpoint in a pulsed RF signal for a tunable edge sheath system0
2024/0266,1512024RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER0
2024/0162,0152024RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER0

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