Weitian KOU

Inventor

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Inventor Addresses

AddressDuration
Eindhoven, NLMar 28, 19 - Oct 22, 24

Technology Profile

Technology Matters
G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR 13
G05B: CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS 3

Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
121241792024Method of wafer alignment using at resolution metrology on product features0
120449812024Method and apparatus for optimization of lithographic process0
117823492023Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus0
2023/0168,5942023METHOD OF WAFER ALIGNMENT USING AT RESOLUTION METROLOGY ON PRODUCT FEATURES0
2023/0168,5912023METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE MANUFACTURING METHOD, CONTROL SYSTEM FOR A LITHOGRAPHIC APPARATUS AND LITHOGRAPHIC APPARATUS0

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