Sung-Cheon Ko
Inventor
Stats
- 1 US patents issued
- 1 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 1 US Patents Issued
- 1 US Applications Filed
- 20 Total Citation Count
- Jun 2, 2004 Most Recent Filing
- Jun 2, 2004 Earliest Filing
Work History
| Patent Owner | Applications Filed | Year |
|---|---|---|
| VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. | 2
| 2004
|
| FREUDENBERG-NOK GENERAL PARTNERSHIP | 2
| 2004
|
Inventor Addresses
| Address | Duration |
|---|---|
| Lexington, MA | Jan 31, 08 - Jan 31, 08 |
| Lexington, MA, US | Feb 01, 11 - Feb 01, 11 |
Technology Profile
| Technology | Matters | |
|---|---|---|
| B05C: | APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL | 1 |
| C23C: | COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL | 1 |
Patents / Publication
| Patents / Publication # | Year of Publication / Issued | Title | Citations |
|---|---|---|---|
| 7878145 | 2011 | Monitoring plasma ion implantation systems for fault detection and process control | 3 |
| 2008/0026,133 | 2008 | Monitoring plasma ion implantation systems for fault detection and process control | 10 |
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