Hyeon Taeg Kim
Inventor
Stats
- 2 US patents issued
- 2 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 2 US Patents Issued
- 2 US Applications Filed
- 4 Total Citation Count
- Oct 28, 2010 Most Recent Filing
- Oct 27, 2010 Earliest Filing
Work History
| Patent Owner | Applications Filed | Year |
|---|---|---|
| NEW OPTICS, LTD. | 2
| 2010
|
| KOREA ELECTROTECHNOLOGY RESEARCH INSTITUTE | 2
| 2010
|
Inventor Addresses
| Address | Duration |
|---|---|
| Gyeongsangnam-do, KR | Sep 06, 12 - Nov 17, 15 |
Technology Profile
| Technology | Matters | |
|---|---|---|
| C23C: | COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL | 1 |
| G03F: | PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR | 1 |
| H01J: | ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS | 1 |
Patents / Publication
| Patents / Publication # | Year of Publication / Issued | Title | Citations |
|---|---|---|---|
| 9190239 | 2015 | Plasma immersion ion milling apparatus and method | 2 |
| 8964167 | 2015 | Cylindrical magnetic levitation stage and lithography | 1 |
| 2013/0120,732 | 2013 | CYLINDRICAL MAGNETIC LEVITATION STAGE AND LITHOGRAPHY | 0 |
| 2012/0222,952 | 2012 | PLASMA IMMERSION ION MILLING APPARATUS AND METHOD | 0 |
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