Panart Khajornrungruang

Inventor

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Work History

Patent OwnerApplications FiledYear
MISHIMA KOSAN CO., LTD.
1
2013
KYUSHU INSTITUTE OF TECHNOLOGY
2
4
1
2011
2013
2015
EBARA CORPORATION
3
1
2013
2015

Inventor Addresses

AddressDuration
Fukuoka, JPSep 18, 14 - Nov 19, 19
Iizuka-shi, JPJan 02, 14 - Jan 02, 14
Kitakyushu, JPJun 17, 14 - Jun 17, 14
Kitakyushu-shi, JPMay 23, 13 - May 23, 13

Technology Profile

Technology Matters
B23Q: DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING 1
B24B: MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING 3
G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS 2

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
104789362019Method and apparatus for measuring surface properties of polishing pad0
104012852019Apparatus for measuring surface properties of polishing pad0
2016/0184,9602016METHOD AND APPARATUS FOR MEASURING SURFACE PROPERTIES OF POLISHING PAD5
89328832015Method of measuring surface properties of polishing pad5
2014/0262,0272014APPARATUS FOR MEASURING SURFACE PROPERTIES OF POLISHING PAD7

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