Michael C Kellogg

Inventor

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Work History

Patent OwnerApplications FiledYear
LAM RESEARCH CORPORATION
6
4
12
2
11
6
1
5
2
1
2008
2009
2010
2011
2012
2013
2014
2015
2016
2017

Inventor Addresses

AddressDuration
Dublin, CA, USMay 12, 11 - Dec 02, 14
Fremont, CA, USMar 06, 14 - Mar 06, 14
Oakland, CA, USFeb 24, 11 - Aug 08, 24
Pleasanton, CA, USJan 07, 10 - Dec 18, 14
San Francisco, CA, USFeb 04, 16 - Sep 24, 24

Technology Profile

Technology Matters
B05B: SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES 1
B05C: APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 1
B23B: TURNING; BORING 1

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
121005752024Plasma processing devices having multi-port valve assemblies0
2024/0266,1512024RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER0
2024/0234,1042024MULTI-SECTIONAL PLASMA CONFINEMENT RING STRUCTURE0
2024/0162,0152024RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER0
117640862023Wafer transport assembly with integrated buffers0

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