Douglas Keil

Inventor

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Work History

Patent OwnerApplications FiledYear
LAM RESEARCH CORPORATION
1
4
1
4
5
2
2
12
6
2
1
4
7
1
1998
2001
2002
2005
2006
2007
2008
2009
2010
2012
2014
2015
2016
2017
NOVELLUS SYSTEMS, INC.
1
2
2
2011
2012
2013

Inventor Addresses

AddressDuration
Fremont, CAApr 17, 01 - Mar 20, 08
Fremont, CA, USNov 21, 02 - Oct 06, 15
WEST LINN, OR, USDec 26, 13 - Dec 26, 13
West Linn, OR, USApr 18, 13 - May 16, 24

Technology Profile

Technology Matters
B05B: SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES 1
B05C: APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 2
B08B: CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 2

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
2024/0162,0132024MECHANICAL SUPPRESSION OF PARASITIC PLASMA IN SUBSTRATE PROCESSING CHAMBER0
118624352024Mechanical suppression of parasitic plasma in substrate processing chamber0
117252822023Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate region1
2023/0238,2202023MECHANICAL SUPPRESSION OF PARASITIC PLASMA IN SUBSTRATE PROCESSING CHAMBER0
116211502023Mechanical suppression of parasitic plasma in substrate processing chamber0

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