Shu-Hsin Kao

Inventor

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Work History

Patent OwnerApplications FiledYear
APLEX, INC.
1
1
2000
2002
PROMOS TECHNOLOGIES INC.
1
3
1997
1998
Aplex Group
1
1997
CHANG LIAO HOLDINGS, LLC
1
1
2
1
1997
1998
2000
2002

Inventor Addresses

AddressDuration
344 Bowsprit Dr., Redwood City, CA 94065Sep 24, 02 - Sep 24, 02
Redwood City, CANov 09, 99 - Apr 05, 05

Technology Profile

Technology Matters
B24B: MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING 9

Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
68750852005Polishing system including a hydrostatic fluid bearing support3
64546412002Hydrostatic fluid bearing support with adjustable inlet heights1
62676552001Retaining ring for wafer polishing26
62449452001Polishing system including a hydrostatic fluid bearing support2
61265272000Seal for polishing belt center support having a single movable sealed cavity16

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