HIDETATSU ISOKAWA
Inventor
Stats
- 0 US patents issued
- 9 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 0 US Patents Issued
- 9 US Applications Filed
- 28 Total Citation Count
- Oct 4, 2021 Most Recent Filing
- Mar 30, 2017 Earliest Filing
Work History
Patent Owner | Applications Filed | Year |
---|---|---|
EBARA CORPORATION | 3
| 2017
|
Inventor Addresses
Address | Duration |
---|---|
Tokyo, JP | Oct 05, 17 - Oct 15, 24 |
Technology Profile
Technology | Matters | |
---|---|---|
B08B: | CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL | 3 |
B24B: | MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING | 4 |
B25J: | MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES | 1 |
Patents / Publication
Patents / Publication # | Year of Publication / Issued | Title | Citations |
---|---|---|---|
12119246 | 2024 | Method, device, and non-transitory computer readable medium for determining timing of removing substrate from cassette in substrate processing device, and substrate processing device | 0 |
11541502 | 2023 | Substrate processing apparatus | 0 |
11380561 | 2022 | Cleaning device, substrate processing apparatus, maintenance method of cleaning device, and computer-readable recording medium including maintenance program of cleaning device | 0 |
2022/0139,741 | 2022 | METHOD, DEVICE, AND NON-TRANSITORY COMPUTER READABLE MEDIUM FOR DETERMINING TIMING OF REMOVING SUBSTRATE FROM CASSETTE IN SUBSTRATE PROCESSING DEVICE, AND SUBSTRATE PROCESSING DEVICE | 0 |
2021/0394,332 | 2021 | SUBSTRATE PROCESSING APPARATUS | 0 |
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