HIDETATSU ISOKAWA

Inventor

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Work History

Patent OwnerApplications FiledYear
EBARA CORPORATION
3
2017

Inventor Addresses

AddressDuration
Tokyo, JPOct 05, 17 - Oct 15, 24

Technology Profile

Technology Matters
B08B: CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 3
B24B: MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING 4
B25J: MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES 1

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
121192462024Method, device, and non-transitory computer readable medium for determining timing of removing substrate from cassette in substrate processing device, and substrate processing device0
115415022023Substrate processing apparatus0
113805612022Cleaning device, substrate processing apparatus, maintenance method of cleaning device, and computer-readable recording medium including maintenance program of cleaning device0
2022/0139,7412022METHOD, DEVICE, AND NON-TRANSITORY COMPUTER READABLE MEDIUM FOR DETERMINING TIMING OF REMOVING SUBSTRATE FROM CASSETTE IN SUBSTRATE PROCESSING DEVICE, AND SUBSTRATE PROCESSING DEVICE0
2021/0394,3322021SUBSTRATE PROCESSING APPARATUS0

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