Katsunori Ichino

Inventor

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Details

Work History

Patent OwnerApplications FiledYear
TOKYO ELECTRON LIMITED
1
4
3
4
2
1
1
2009
2010
2011
2013
2014
2015
2017

Inventor Addresses

AddressDuration
Koshi City Kumamoto, JPDec 17, 20 - Dec 17, 20
Koshi City, JPMar 03, 11 - Mar 21, 24
Koshi Kumamoto, JPFeb 21, 23 - Feb 21, 23
Koshi, JPNov 06, 12 - Sep 17, 24
Koshi-City, JPOct 13, 11 - Oct 13, 11
Koshi-Shi, JPAug 19, 10 - Dec 22, 11
Koshi-shi, JPNov 26, 09 - Nov 26, 09
Kumamoto, JPAug 21, 14 - Apr 16, 19

Technology Profile

Technology Matters
B01D: SEPARATION 4
B05B: SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES 4
B05C: APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 7

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
120947372024Substrate processing apparatus, control method, and computer-readable storage medium0
2024/0094,6442024SUBSTRATE TREATMENT APPARATUS AND TREATMENT SOLUTION SUPPLY METHOD0
115878052023Substrate processing apparatus and substrate processing method0
2021/0020,4642021SUBSTRATE PROCESSING APPARATUS, CONTROL METHOD, AND COMPUTER-READABLE STORAGE MEDIUM0
2020/0395,2272020SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD0

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