Toru ISHIMURA

Inventor

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Work History

Patent OwnerApplications FiledYear
CANON ANELVA CORPORATION
1
2014

Inventor Addresses

AddressDuration
Machida-shi, JPOct 02, 14 - Oct 02, 14

Technology Profile

Technology Matters
H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 1

Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
2014/0291,1482014SPUTTERING APPARATUS1

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