Thomas C Hyde

Inventor

Add to Portfolio

Stats

Details

Work History

Patent OwnerApplications FiledYear
ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, INC.
1
1992
IPEC PLANAR, INC.
1
1992
Westech Systems, Inc.
1
1
1988
1989
SPEEDFAM-IPEC CORPORATION
1
1992

Inventor Addresses

AddressDuration
Chandler, AZJul 31, 90 - Nov 02, 93

Technology Profile

Technology Matters
B24B: MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING 3

Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
52574781993Apparatus for interlayer planarization of semiconductor material209
50956611992Apparatus for transporting wafer to and from polishing head50
49441191990Apparatus for transporting wafer to and from polishing head56

See more…


We are sorry but your current selection exceeds the maximum number of portfolios (0) for this membership level.
> Upgrade to our Level for up to -1 portfolios!.