Chunsheng Huang

Inventor

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Work History

Patent OwnerApplications FiledYear
NANOMETRICS INCORPORATED
1
1
1
2003
2004
2005
KLA-TENCOR CORPORATION
1
2
3
2011
2012
2016
Tropel Corporation
1
1993
ESGW Holdings Limited
1
2007

Inventor Addresses

AddressDuration
Milpitas, CA, USFeb 08, 18 - Jun 18, 19
San Jose, CAMay 16, 95 - Oct 07, 08
San Jose, CA, USJan 30, 14 - Oct 20, 20
Shenzhen, CNNov 11, 08 - Nov 11, 08

Technology Profile

Technology Matters
G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS 5
G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY 2
G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 4

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
108090552020Apparatus and method for measuring topography and gradient of the surfaces, shape, and thickness of patterned and unpatterned wafers2
107324242020Inspection-beam shaping on a sample surface at an oblique angle of incidence0
2020/0132,6082020SCANNING DIFFERENTIAL INTERFERENCE CONTRAST IN AN IMAGING SYSTEM DESIGN1
2020/0033,1172020Apparatus and Method for Measuring Topography and Gradient of the Surfaces, Shape, and Thickness of Patterned and Unpatterned Wafers2
2019/0250,4142019Inspection-Beam Shaping on a Sample Surface at an Oblique Angle of Incidence0

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