Tseh-Jen Hsieh

Inventor

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Work History

Patent OwnerApplications FiledYear
AXCELIS TECHNOLOGIES, INC.
3
2
2
1
1
5
2010
2011
2013
2014
2016
2017
SILICON VALLEY BANK
2
2011

Inventor Addresses

AddressDuration
ROWLEY, MA, USNov 16, 17 - Nov 16, 17
Rowley, MA, USMay 17, 12 - Nov 19, 24

Technology Profile

Technology Matters
C01B: NON-METALLIC ELEMENTS; COMPOUNDS THEREOF 2
C01F: COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS 2
C01G: COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F 1

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
D10518382024Single-slot tubular cathode0
2024/0371,6022024Heated Plasma Flood Gun Sweeper0
121069252024Cyclotron having continuously variable energy output0
2024/0274,4042024System and Method for Reducing Particle Formation in a Process Chamber of an Ion Implanter0
2024/0249,9082024Dose Cup Assembly for an Ion Implanter0

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