DAQUAN HE

Inventor

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Work History

Patent OwnerApplications FiledYear
SHANGHAI HUALI MICROELECTRONICS CORPORATION
1
2015

Inventor Addresses

AddressDuration
Shanghai, CNOct 06, 16 - Oct 06, 16

Technology Profile

Technology Matters
G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR 1
G06F: ELECTRIC DIGITAL DATA PROCESSING 1

Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
2016/0291,4582016METHOD INTEGRATING TARGET OPTIMIZATION AND OPTICAL PROXIMITY CORRECTION1

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