Joachim Hainz
Inventor
Stats
- 11 US patents issued
- 17 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 11 US Patents Issued
- 17 US Applications Filed
- 250 Total Citation Count
- Sep 18, 2008 Most Recent Filing
- May 17, 2002 Earliest Filing
Work History
| Patent Owner | Applications Filed | Year |
|---|---|---|
| CARL ZEISS SMT GMBH | 6
4 4 3 | 2004
2005 2006 2007 |
| CARL ZEISS SMT AG | 2
2 3 2 2 | 2002
2003 2006 2007 2008 |
Inventor Addresses
| Address | Duration |
|---|---|
| Aalen, DE | May 08, 03 - Mar 22, 11 |
| Jena, DE | - |
Technology Profile
| Technology | Matters | |
|---|---|---|
| A61G: | TRANSPORT, PERSONAL CONVEYANCES, OR ACCOMMODATION SPECIALLY ADAPTED FOR PATIENTS OR DISABLED PERSONS | 1 |
| A61N: | ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY | 2 |
| F26B: | DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM | 1 |
Patents / Publication
| Patents / Publication # | Year of Publication / Issued | Title | Citations |
|---|---|---|---|
| 7911584 | 2011 | Illumination system for microlithography | 0 |
| 2009/0015,812 | 2009 | ILLUMINATION SYSTEM PARTICULARLY FOR MICROLITHOGRAPHY | 22 |
| 7460212 | 2008 | Collector configured of mirror shells | 9 |
| 7443948 | 2008 | Illumination system particularly for microlithography | 1 |
| 2008/0225,387 | 2008 | COLLECTOR FOR ILLUMINATION SYSTEMS WITH A WAVELENGTH LESS THAN OR EQUAL TO 193 nm | 14 |
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