Toshio Hiroe

Inventor

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Work History

Patent OwnerApplications FiledYear
SCREEN HOLDINGS CO., LTD.
2
4
4
2
2003
2005
2006
2007
DAINIPPON SCREEN MFG. CO., LTD.
1
1
1
2
2
1
1991
1992
2003
2004
2007
2011
SILICON LIGHT MACHINES CORPORATION
1
2011

Inventor Addresses

AddressDuration
Hazukashi, JPFeb 17, 15 - Feb 17, 15
Horikawa-dori, JPOct 14, 04 - Oct 14, 04
Kyoto, JPSep 25, 03 - Oct 20, 11
Shiga, JPMar 09, 93 - Mar 09, 93
Shiga-ken, JPAug 12, 97 - Aug 12, 97

Technology Profile

Technology Matters
A47G: HOUSEHOLD OR TABLE EQUIPMENT 1
B01F: MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING 1
B01J: CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS, COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS 1

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
89575642015Microelectromechanical system megasonic transducer38
2011/0256,7282011WAFER THINNING METHOD IN WAFER TREATING SYSTEM3
79381292011Substrate processing apparatus5
76151182009Substrate processing apparatus and substrate processing method0
75412852009Substrate processing apparatus and substrate processing method2

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