Dingkai Guo

Inventor

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Work History

Patent OwnerApplications FiledYear
ATMI Korea Co., Ltd
1
2014
ENTEGRIS, INC.
1
1
2014
2016

Inventor Addresses

AddressDuration
Danbury, CT, USDec 17, 15 - Jan 22, 19

Technology Profile

Technology Matters
C01G: COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F 1
C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 2
H01L: SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 2

Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
101865702019ALD processes for low leakage current and low equivalent oxide thickness BiTaO films1
2017/0103,8882017AMINE CATALYSTS FOR LOW TEMPERATURE ALD/CVD SiO2 DEPOSITION USING HEXACHLORODISILANE/H2O0
2015/0364,5372015ALD PROCESSES FOR LOW LEAKAGE CURRENT AND LOW EQUIVALENT OXIDE THICKNESS BiTaO FILMS0

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