Edward Golubovsky
Inventor
Stats
- 2 US patents issued
- 19 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 2 US Patents Issued
- 19 US Applications Filed
- 37 Total Citation Count
- Jun 3, 2024 Most Recent Filing
- May 16, 2005 Earliest Filing
Work History
Patent Owner | Applications Filed | Year |
---|---|---|
APPLIED MATERIALS, INC. | 2
1 | 2005
2009 |
Inventor Addresses
Address | Duration |
---|---|
San Jose, CA | Nov 16, 06 - Nov 16, 06 |
San Jose, CA, US | May 11, 10 - Apr 10, 25 |
Technology Profile
Technology | Matters | |
---|---|---|
B08B: | CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL | 3 |
B24B: | MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING | 10 |
B25J: | MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES | 2 |
Patents / Publication
Patents / Publication # | Year of Publication / Issued | Title | Citations |
---|---|---|---|
2025/0114,902 | 2025 | HORIZONTAL PRE-CLEAN 2-STAGE DOWNFORCE MECHANISM WITH FLEXURE | 0 |
2024/0412,985 | 2024 | DEDICATED SULFURIC-PEROXIDE PROCESS MODULE FOR POST-CMP CLEANING PLATFORMS | 0 |
12142513 | 2024 | Wafer processing tools and methods thereof | 0 |
2024/0363,371 | 2024 | SUBSTRATE CLEANING IMPROVEMENT | 0 |
2024/0100,713 | 2024 | METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE IN CLEANING MODULES | 0 |
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