Edward Golubovsky

Inventor

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Work History

Patent OwnerApplications FiledYear
APPLIED MATERIALS, INC.
2
1
2005
2009

Inventor Addresses

AddressDuration
San Jose, CANov 16, 06 - Nov 16, 06
San Jose, CA, USMay 11, 10 - Apr 10, 25

Technology Profile

Technology Matters
B08B: CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 3
B24B: MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING 10
B25J: MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES 2

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
2025/0114,9022025HORIZONTAL PRE-CLEAN 2-STAGE DOWNFORCE MECHANISM WITH FLEXURE0
2024/0412,9852024DEDICATED SULFURIC-PEROXIDE PROCESS MODULE FOR POST-CMP CLEANING PLATFORMS0
121425132024Wafer processing tools and methods thereof0
2024/0363,3712024SUBSTRATE CLEANING IMPROVEMENT0
2024/0100,7132024METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE IN CLEANING MODULES0

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