Michael A Fisk
Inventor
Stats
- 4 US patents issued
- 4 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 4 US Patents Issued
- 4 US Applications Filed
- 133 Total Citation Count
- Apr 15, 1988 Most Recent Filing
- May 23, 1983 Earliest Filing
Work History
Patent Owner | Applications Filed | Year |
---|---|---|
SILICON VALLEY GROUP, INC. | 1
1 1 | 1983
1986 1987 |
AVIZA TECHNOLOGY, INC. | 1
| 1988
|
THERMCO SYSTEMS, INC., A CORP OF CA | 1
1 1 | 1983
1986 1987 |
Inventor Addresses
Address | Duration |
---|---|
Anaheim, CA | Oct 28, 86 - Dec 12, 89 |
Technology Profile
Technology | Matters | |
---|---|---|
B05D: | PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL | 1 |
C23C: | COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL | 2 |
H01L: | SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR | 1 |
Patents / Publication
Patents / Publication # | Year of Publication / Issued | Title | Citations |
---|---|---|---|
4886954 | 1989 | Hot wall diffusion furnace and method for operating the furnace | 40 |
4817557 | 1989 | Process and apparatus for low pressure chemical vapor deposition of refractory metal | 39 |
4726961 | 1988 | Process for low pressure chemical vapor deposition of refractory metal | 10 |
4619840 | 1986 | Process and apparatus for low pressure chemical vapor deposition of refractory metal | 22 |
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