Stefan Eyring
Inventor
Stats
- 2 US patents issued
- 17 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 2 US Patents Issued
- 17 US Applications Filed
- 60 Total Citation Count
- Jun 1, 2023 Most Recent Filing
- Jun 12, 2014 Earliest Filing
Work History
Patent Owner | Applications Filed | Year |
---|---|---|
KLA-TENCOR CORPORATION | 2
1 | 2014
2015 |
Inventor Addresses
Address | Duration |
---|---|
Weilburg, DE | Oct 16, 14 - Sep 10, 24 |
Technology Profile
Technology | Matters | |
---|---|---|
G01B: | MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS | 5 |
G01N: | INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES | 3 |
G03B: | APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR | 1 |
Patents / Publication
Patents / Publication # | Year of Publication / Issued | Title | Citations |
---|---|---|---|
12085385 | 2024 | Design-assisted large field of view metrology | 0 |
12055859 | 2024 | Overlay mark design for electron beam overlay | 0 |
2024/0093,985 | 2024 | SYSTEM AND METHOD FOR ACQUIRING ALIGNMENT MEASUREMENTS OF STRUCTURES OF A BONDED SAMPLE | 0 |
11894214 | 2024 | Detection and correction of system responses in real-time | 0 |
11862524 | 2024 | Overlay mark design for electron beam overlay | 0 |
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