Stefan Eyring

Inventor

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Work History

Patent OwnerApplications FiledYear
KLA-TENCOR CORPORATION
2
1
2014
2015

Inventor Addresses

AddressDuration
Weilburg, DEOct 16, 14 - Sep 10, 24

Technology Profile

Technology Matters
G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS 5
G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 3
G03B: APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR 1

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
120853852024Design-assisted large field of view metrology0
120558592024Overlay mark design for electron beam overlay0
2024/0093,9852024SYSTEM AND METHOD FOR ACQUIRING ALIGNMENT MEASUREMENTS OF STRUCTURES OF A BONDED SAMPLE0
118942142024Detection and correction of system responses in real-time0
118625242024Overlay mark design for electron beam overlay0

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