Russell Elloway

Inventor

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Work History

Patent OwnerApplications FiledYear
SILICON VALLEY GROUP, INC.
1
2
1985
1986
AVIZA TECHNOLOGY, INC.
1
1986
TETREON TECHNOLOGIES LIMITED
1
3
1985
1986

Inventor Addresses

AddressDuration
Riverside, CAJan 13, 87 - Jan 26, 88

Technology Profile

Technology Matters
B65G: TRANSPORT OR STORAGE DEVICES, e.g. CONVEYERS FOR LOADING OR TIPPING; SHOP CONVEYER SYSTEMS; PNEUMATIC TUBE CONVEYERS 2
F27D: DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE 1
G05B: CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS 1

Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
47214241988Semiconductor wafer boat loader releaseable mounting6
46921151987Semiconductor wafer furnace door9
46848631987Semiconductor wafer boat loader control system2
46361401987Method of loading and unloading a furnace1

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