Hiroshi Ekko

Inventor

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Work History

Patent OwnerApplications FiledYear
HITACHI KOKUSAI ELECTRIC INC.
3
1
3
2007
2008
2013

Inventor Addresses

AddressDuration
Toyama, JPAug 12, 14 - Sep 29, 22
Toyama-shi, JPJul 24, 08 - Sep 26, 24

Technology Profile

Technology Matters
C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 2
G05B: CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS 1
G06F: ELECTRIC DIGITAL DATA PROCESSING 2

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
2024/0319,7072024SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM0
2022/0310,4132022SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM0
101319922018Substrate processing apparatus, method of controlling substrate processing apparatus, method of maintaining substrate processing apparatus, and recording medium2
96908792017Substrate processing apparatus, method of manufacturing semiconductor device, and method of generating recipe0
2015/0096,4942015SUBSTRATE PROCESSING APPARATUS, METHOD OF CONTROLLING SUBSTRATE PROCESSING APPARATUS, METHOD OF MAINTAINING SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM7

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