Shinji Ebisu
Inventor
Stats
- 1 US patents issued
- 3 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 1 US Patents Issued
- 3 US Applications Filed
- 2 Total Citation Count
- Feb 10, 2023 Most Recent Filing
- Jun 16, 2015 Earliest Filing
Work History
| Patent Owner | Applications Filed | Year |
|---|---|---|
| SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO., LTD. | 2
1 | 2015
2016 |
Inventor Addresses
| Address | Duration |
|---|---|
| Ehime, JP | Dec 17, 15 - Aug 17, 23 |
Technology Profile
| Technology | Matters | |
|---|---|---|
| C23C: | COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL | 1 |
| H01J: | ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS | 2 |
| H01L: | SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR | 1 |
Patents / Publication
| Patents / Publication # | Year of Publication / Issued | Title | Citations |
|---|---|---|---|
| 2023/0260,741 | 2023 | ION IMPLANTER AND ION IMPLANTATION METHOD | 0 |
| 10468283 | 2019 | Ion implantation apparatus and method for processing plurality of wafers using the same | 0 |
| 9666413 | 2017 | Ion implantation apparatus and control method for ion implantation apparatus | 0 |
| 2017/0040,197 | 2017 | ION IMPLANTATION APPARATUS AND METHOD FOR PROCESSING PLURALITY OF WAFERS USING THE SAME | 0 |
| 2015/0364,299 | 2015 | ION IMPLANTATION APPARATUS AND CONTROL METHOD FOR ION IMPLANTATION APPARATUS | 1 |
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