Thaddeus Gerard Dziura
Inventor
Stats
- 8 US patents issued
- 21 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 8 US Patents Issued
- 21 US Applications Filed
- 295 Total Citation Count
- Apr 18, 2022 Most Recent Filing
- Jan 16, 2013 Earliest Filing
Work History
Patent Owner | Applications Filed | Year |
---|---|---|
KLA-TENCOR CORPORATION | 7
7 2 3 1 | 2013
2014 2015 2016 2017 |
Inventor Addresses
Address | Duration |
---|---|
San Jose, CA, US | Aug 29, 13 - Aug 25, 22 |
Technology Profile
Technology | Matters | |
---|---|---|
G01B: | MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS | 10 |
G01N: | INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES | 15 |
G03F: | PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR | 8 |
Patents / Publication
Patents / Publication # | Year of Publication / Issued | Title | Citations |
---|---|---|---|
2022/0268,714 | 2022 | Full Beam Metrology For X-Ray Scatterometry Systems | 0 |
2022/0252,395 | 2022 | Methods And Systems For Accurate Measurement Of Deep Structures Having Distorted Geometry | 2 |
11313816 | 2022 | Full beam metrology for x-ray scatterometry systems | 0 |
2021/0407,864 | 2021 | Process Monitoring Of Deep Structures With X-Ray Scatterometry | 1 |
11145559 | 2021 | Process monitoring of deep structures with X-ray scatterometry | 1 |
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