Thaddeus Gerard Dziura

Inventor

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Work History

Patent OwnerApplications FiledYear
KLA-TENCOR CORPORATION
7
7
2
3
1
2013
2014
2015
2016
2017

Inventor Addresses

AddressDuration
San Jose, CA, USAug 29, 13 - Aug 25, 22

Technology Profile

Technology Matters
G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS 10
G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 15
G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR 8

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
2022/0268,7142022Full Beam Metrology For X-Ray Scatterometry Systems0
2022/0252,3952022Methods And Systems For Accurate Measurement Of Deep Structures Having Distorted Geometry2
113138162022Full beam metrology for x-ray scatterometry systems0
2021/0407,8642021Process Monitoring Of Deep Structures With X-Ray Scatterometry1
111455592021Process monitoring of deep structures with X-ray scatterometry1

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