Oliver Dier
Inventor
Stats
- 4 US patents issued
- 13 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 4 US Patents Issued
- 13 US Applications Filed
- 31 Total Citation Count
- Jun 14, 2024 Most Recent Filing
- Feb 6, 2013 Earliest Filing
Work History
| Patent Owner | Applications Filed | Year |
|---|---|---|
| CARL ZEISS SMT GMBH | 4
1 2 3 | 2013
2014 2015 2016 |
Inventor Addresses
| Address | Duration |
|---|---|
| Lauchheim, DE | Jul 11, 13 - May 10, 22 |
| Oberkochen, DE | Dec 19, 24 - Dec 19, 24 |
Technology Profile
| Technology | Matters | |
|---|---|---|
| B82Y: | SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE OR TREATMENT OF NANO-STRUCTURES | 2 |
| G01B: | MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS | 1 |
| G01J: | MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY | 1 |
Patents / Publication
| Patents / Publication # | Year of Publication / Issued | Title | Citations |
|---|---|---|---|
| 2024/0419,066 | 2024 | METHOD FOR INCORPORATING TEMPERATURE-REGULATING HOLLOW STRUCTURES INTO A SUBSTRATE, IN PARTICULAR INTO A SUBSTRATE FOR AN OPTICAL ELEMENT, METHOD AND SUBSTRATE FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT, PROCESSING SYSTEM AND ALSO APPARATUS PERTAINING TO SEMICONDUCTOR TECHNOLOGY AND STRUCTURED ELECTRONIC COMPONENT | 0 |
| 11328831 | 2022 | Method for treating a reflective optical element for the EUV wavelength range, method for producing same, and treating apparatus | 0 |
| 10520827 | 2019 | Optical system, in particular for a microlithographic projection exposure apparatus | 0 |
| 2019/0212,659 | 2019 | OPTICAL SYSTEM, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS | 0 |
| 10331048 | 2019 | Mirror, in particular for a microlithographic projection exposure apparatus | 1 |
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