Markus Deguenther

Inventor

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Details

Work History

Patent OwnerApplications FiledYear
SONATA
2
2013
CARL ZEISS SMT GMBH
2
5
8
10
10
19
10
14
19
29
24
25
8
2004
2005
2006
2008
2009
2010
2011
2012
2013
2014
2015
2016
2017
ASML NETHERLANDS B.V.
2
2
2011
2015
CARL ZEISS SMT AG
1
2
1
2004
2005
2006

Inventor Addresses

AddressDuration
Aalen, DEOct 06, 05 - Mar 24, 20
Florrstadt, DEOct 29, 20 - Oct 29, 20
Florstadt, DEJan 10, 19 - May 09, 24

Technology Profile

Technology Matters
B23K: SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM 2
F21V: FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR 11
G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS 4

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
2024/0152,0572024APPARATUS AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK0
119143032024Apparatus and method for characterizing a microlithographic mask0
2024/0061,3282024METHOD AND APPARATUS FOR CHARACTERIZATION OF A MICROLITHOGRAPHY MASK0
113788872022Pupil facet mirror, illumination optics and optical system for a projection lithography system0
112626602022Image sensor, position sensor device, lithography system, and method for operating an image sensor0

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