Martinus Coenen

Inventor

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Work History

Patent OwnerApplications FiledYear
ASML NETHERLANDS B.V.
1
2012

Inventor Addresses

AddressDuration
Eindhoven, NLSep 04, 14 - Sep 04, 14

Technology Profile

Technology Matters
G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR 1

Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
2014/0247,4352014RADIATION SOURCE DEVICE, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD0

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