Hin Yiu Chung

Inventor

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Work History

Patent OwnerApplications FiledYear
MATTSON THERMAL PRODUCTS GMBH
1
1
2002
2004
CARL ZEISS SMT GMBH
1
2012
MATTSON THERMAL PRODUCTS
1
2003

Inventor Addresses

AddressDuration
Elchingen, DEJul 01, 04 - Dec 05, 06
Ulm, DEApr 25, 13 - Apr 25, 13

Technology Profile

Technology Matters
B65B: MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING 1
B66C: CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES 1
G02B: OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS 1

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
2013/0100,4262013METHOD FOR PRODUCING FACET MIRRORS AND PROJECTION EXPOSURE APPARATUS5
71447472006Method for thermally treating a substrate that comprises several layers0
2006/0245,9062006Device for accommodating disk-shaped objects and apparatus for handling objects6
2004/0209,4832004Method for thermally treating a substrate that comprises several layers0
2004/0126,2132004Device for accommodating disk-shaped objects and apparatus for handling objects315

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