Frank Chilese

Inventor

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Work History

Patent OwnerApplications FiledYear
PICARRO, INC.
2
2003
SANDIA CORPORATION
2
1
2013
2014
NATIONAL TECHNOLOGY & ENGINEERING SOLUTIONS OF SANDIA, LLC
2
2013
KLA-TENCOR CORPORATION
1
2
12
7
1
2011
2012
2013
2014
2016

Inventor Addresses

AddressDuration
San Ramon, CAMay 23, 06 - May 23, 06
San Ramon, CA, USJan 27, 05 - Jan 31, 23

Technology Profile

Technology Matters
B01D: SEPARATION 1
G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS 1
G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY 1

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
115668872023Differential height measurement using interstitial mirror plate0
114192022022Laser produced plasma light source having a target material coated on a cylindrically-symmetric element0
2021/0136,9032021Laser Produced Plasma Light Source Having a Target Material Coated on a Cylindrically-Symmetric Element0
108935992021Laser produced plasma light source having a target material coated on a cylindrically-symmetric element0
107773772020Multi-column spacing for photomask and reticle inspection and wafer print check verification0

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