JR-SHENG CHEN
Inventor
Stats
- 1 US patents issued
- 15 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 1 US Patents Issued
- 15 US Applications Filed
- 6 Total Citation Count
- Jul 10, 2024 Most Recent Filing
- Apr 26, 2016 Earliest Filing
Work History
Patent Owner | Applications Filed | Year |
---|---|---|
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. | 1
| 2016
|
Inventor Addresses
Address | Duration |
---|---|
Hsinchu City, TW | Oct 26, 17 - Nov 30, 23 |
Hsinchu, TW | Jun 12, 18 - Oct 31, 24 |
Technology Profile
Technology | Matters | |
---|---|---|
B81B: | MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES | 1 |
B81C: | PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS | 5 |
G06F: | ELECTRIC DIGITAL DATA PROCESSING | 1 |
Patents / Publication
Patents / Publication # | Year of Publication / Issued | Title | Citations |
---|---|---|---|
2024/0363,312 | 2024 | METHODS AND SYSTEMS FOR COOLING PLASMA TREATMENT COMPONENTS | 0 |
12062523 | 2024 | Methods and systems for cooling plasma treatment components | 0 |
2023/0386,799 | 2023 | FOCUS RING FOR A PLASMA-BASED SEMICONDUCTOR PROCESSING TOOL | 0 |
11769652 | 2023 | Devices and methods for controlling wafer uniformity in plasma-based process | 0 |
2023/0260,758 | 2023 | METHODS AND SYSTEMS FOR COOLING PLASMA TREATMENT COMPONENTS | 0 |
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