JR-SHENG CHEN

Inventor

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Work History

Patent OwnerApplications FiledYear
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
1
2016

Inventor Addresses

AddressDuration
Hsinchu City, TWOct 26, 17 - Nov 30, 23
Hsinchu, TWJun 12, 18 - Oct 31, 24

Technology Profile

Technology Matters
B81B: MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES 1
B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS 5
G06F: ELECTRIC DIGITAL DATA PROCESSING 1

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
2024/0363,3122024METHODS AND SYSTEMS FOR COOLING PLASMA TREATMENT COMPONENTS0
120625232024Methods and systems for cooling plasma treatment components0
2023/0386,7992023FOCUS RING FOR A PLASMA-BASED SEMICONDUCTOR PROCESSING TOOL0
117696522023Devices and methods for controlling wafer uniformity in plasma-based process0
2023/0260,7582023METHODS AND SYSTEMS FOR COOLING PLASMA TREATMENT COMPONENTS0

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