Kuei-Sung CHANG

Inventor

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Work History

Patent OwnerApplications FiledYear
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., ("TSMC")
2
2013
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
2
13
10
17
11
13
7
1
2010
2011
2012
2013
2014
2015
2016
2017

Inventor Addresses

AddressDuration
KAOHSIUNG CITY, TWJul 23, 15 - Aug 22, 24
Kaohsiung City, KRAug 25, 16 - Aug 25, 16
Kaohsiung City, TWApr 12, 12 - Apr 03, 25
Kaohsiung city, TWMar 19, 15 - Nov 07, 24
Kaohsiung, TWJul 31, 12 - Feb 25, 25
Kaosiung, TWNov 04, 14 - Nov 04, 14
Koahsiung, TWDec 01, 20 - Dec 01, 20

Technology Profile

Technology Matters
B25B: TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING, OR HOLDING 3
B81B: MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES 54
B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS 62

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
2025/0112,0812025VACUUM WAFER CHUCK FOR MANUFACTURING SEMICONDUCTOR DEVICES0
122341412025Outgassing material coated cavity for a micro-electro mechanical system device and methods for forming the same0
121911852025Vacuum wafer chuck for manufacturing semiconductor devices0
121519322024Microelectromechanical systems device having a mechanically robust anti-stiction/outgassing structure0
2024/0375,9392024STOPPER BUMP STRUCTURES FOR MEMS DEVICE0

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