Kayo CHAEN
Inventor
Stats
- 0 US patents issued
- 1 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 0 US Patents Issued
- 1 US Applications Filed
- 1 Total Citation Count
- Aug 24, 2020 Most Recent Filing
- Aug 24, 2020 Earliest Filing
Work History
No Work History Available.Inventor Addresses
| Address | Duration |
|---|---|
| Tokyo, JP | Aug 25, 22 - Oct 01, 24 |
Technology Profile
| Technology | Matters | |
|---|---|---|
| G03F: | PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR | 1 |
| H01J: | ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS | 1 |
Patents / Publication
| Patents / Publication # | Year of Publication / Issued | Title | Citations |
|---|---|---|---|
| 12105411 | 2024 | Substrate with multilayer reflective film, reflective mask blank, reflective mask, and method for manufacturing semiconductor device | 0 |
| 2022/0269,161 | 2022 | MULTILAYER REFLECTIVE FILM-ATTACHED SUBSTRATE, REFLECTIVE MASK BLANK, REFLECTIVE MASK, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE | 1 |
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