Markus Brotsack
Inventor
Stats
- 9 US patents issued
- 15 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 9 US Patents Issued
- 15 US Applications Filed
- 844 Total Citation Count
- Jan 4, 2011 Most Recent Filing
- Sep 13, 2004 Earliest Filing
Work History
| Patent Owner | Applications Filed | Year |
|---|---|---|
| CARL ZEISS SMT AG | 2
| 2008
|
| CARL ZEISS SMT GMBH | 6
4 1 2 2 3 1 | 2004
2005 2006 2007 2008 2010 2011 |
| Carl Zeiss | 1
| 2008
|
| CARL ZEISS SMT AG | 2
1 | 2005
2011 |
Inventor Addresses
| Address | Duration |
|---|---|
| Aalen, DE | Jul 07, 05 - Jul 29, 14 |
| Notzing, DE | Aug 05, 10 - Aug 05, 10 |
| Oberding, DE | Dec 13, 07 - Dec 13, 07 |
Technology Profile
| Technology | Matters | |
|---|---|---|
| B05D: | PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL | 1 |
| F21V: | FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR | 1 |
| G02B: | OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS | 2 |
Patents / Publication
| Patents / Publication # | Year of Publication / Issued | Title | Citations |
|---|---|---|---|
| 8792082 | 2014 | Illumination system for microlithography | 0 |
| 8767181 | 2014 | Microlithographic exposure method as well as a projection exposure system for carrying out the method | 0 |
| 2011/0096,316 | 2011 | ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY | 2 |
| 2011/0069,296 | 2011 | MICROLITHOGRAPHIC EXPOSURE METHOD AS WELL AS A PROJECTION EXPOSURE SYSTEM FOR CARRYING OUT THE METHOD | 46 |
| 7884922 | 2011 | Illumination system for microlithography | 2 |
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