Butch Berney
Inventor
Stats
- 7 US patents issued
- 15 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 7 US Patents Issued
- 15 US Applications Filed
- 1009 Total Citation Count
- Mar 23, 2021 Most Recent Filing
- Sep 30, 1996 Earliest Filing
Work History
| Patent Owner | Applications Filed | Year |
|---|---|---|
| LAM RESEARCH AG | 2
| 2016
|
| LAM RESEARCH CORPORATION | 2
1 1 1 2 1 1 | 1996
1998 1999 2001 2002 2003 2006 |
Inventor Addresses
| Address | Duration |
|---|---|
| PLEASANTON, CA, US | Nov 30, 17 - Feb 15, 18 |
| Pleasanton, CA | Nov 10, 98 - Aug 08, 06 |
| Pleasanton, CA, US | Nov 06, 03 - Jan 14, 25 |
| San Jose, CA | Aug 07, 01 - Aug 07, 01 |
Technology Profile
| Technology | Matters | |
|---|---|---|
| C23C: | COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL | 2 |
| C23F: | NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES | 2 |
| F26B: | DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM | 1 |
Patents / Publication
| Patents / Publication # | Year of Publication / Issued | Title | Citations |
|---|---|---|---|
| 12198945 | 2025 | Vapor delivery head for preventing stiction of high aspect ratio structures and/or repairing high aspect ratio structures | 0 |
| 2023/0131,233 | 2023 | RAPID AND PRECISE TEMPERATURE CONTROL FOR THERMAL ETCHING | 1 |
| 2022/0308,462 | 2022 | APPARATUS FOR PHOTORESIST DRY DEPOSITION | 10 |
| 2021/0366,738 | 2021 | VAPOR DELIVERY HEAD FOR PREVENTING STICTION OF HIGH ASPECT RATIO STRUCTURES AND/OR REPAIRING HIGH ASPECT RATIO STRUCTURES | 0 |
| 10861719 | 2020 | Method and apparatus for processing wafer-shaped articles | 0 |
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