Neil Benjamin

Inventor

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Stats

Details

Work History

Patent OwnerApplications FiledYear
LAM RESEARCH CORPORATION
1
4
1
1
3
3
6
6
9
2
7
8
3
9
1
3
4
1994
1996
1998
1999
2000
2001
2002
2003
2004
2006
2008
2009
2012
2013
2014
2015
2016
YOKOWO CO., LTD.
2
2004

Inventor Addresses

AddressDuration
Austin, TXDec 19, 06 - Aug 07, 07
Austin, TX, USJan 01, 09 - Mar 15, 16
E. Palo Alto, CAJun 09, 05 - Jun 09, 05
E. Palo Alto, CA, USMar 02, 06 - Sep 08, 20
E.P.A., CADec 31, 96 - Dec 31, 96
East Palo Alto, CAJan 13, 98 - Sep 25, 07
East Palo Alto, CA, USAug 11, 05 - Jul 21, 20
Palo Alto, CAJan 26, 99 - Jul 25, 06
Palo Alto, CA, USNov 06, 03 - Apr 30, 19

Technology Profile

Technology Matters
A21B: BAKERS' OVENS; MACHINES OR EQUIPMENT FOR BAKING 1
B05C: APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 1
B23K: SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM 4

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
107703632020Power switching system for ESC with array of thermal control elements0
107203462020Substrate support with thermal zones for semiconductor processing3
104034752019Tunable multi-zone gas injection system11
102763482019Methods and apparatus for a hybrid capacitively-coupled and an inductively-coupled plasma processing system2
102361932019Substrate supports with multi-layer structure including independent operated heater zones6

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