Neil Benjamin
Inventor
Stats
- 42 US patents issued
- 54 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 42 US Patents Issued
- 54 US Applications Filed
- 2464 Total Citation Count
- Aug 7, 2018 Most Recent Filing
- Dec 6, 1994 Earliest Filing
Work History
Patent Owner | Applications Filed | Year |
---|---|---|
LAM RESEARCH CORPORATION | 1
4 1 1 3 3 6 6 9 2 7 8 3 9 1 3 4 | 1994
1996 1998 1999 2000 2001 2002 2003 2004 2006 2008 2009 2012 2013 2014 2015 2016 |
YOKOWO CO., LTD. | 2
| 2004
|
Inventor Addresses
Address | Duration |
---|---|
Austin, TX | Dec 19, 06 - Aug 07, 07 |
Austin, TX, US | Jan 01, 09 - Mar 15, 16 |
E. Palo Alto, CA | Jun 09, 05 - Jun 09, 05 |
E. Palo Alto, CA, US | Mar 02, 06 - Sep 08, 20 |
E.P.A., CA | Dec 31, 96 - Dec 31, 96 |
East Palo Alto, CA | Jan 13, 98 - Sep 25, 07 |
East Palo Alto, CA, US | Aug 11, 05 - Jul 21, 20 |
Palo Alto, CA | Jan 26, 99 - Jul 25, 06 |
Palo Alto, CA, US | Nov 06, 03 - Apr 30, 19 |
Technology Profile
Technology | Matters | |
---|---|---|
A21B: | BAKERS' OVENS; MACHINES OR EQUIPMENT FOR BAKING | 1 |
B05C: | APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL | 1 |
B23K: | SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM | 4 |
Patents / Publication
Patents / Publication # | Year of Publication / Issued | Title | Citations |
---|---|---|---|
10770363 | 2020 | Power switching system for ESC with array of thermal control elements | 0 |
10720346 | 2020 | Substrate support with thermal zones for semiconductor processing | 3 |
10403475 | 2019 | Tunable multi-zone gas injection system | 11 |
10276348 | 2019 | Methods and apparatus for a hybrid capacitively-coupled and an inductively-coupled plasma processing system | 2 |
10236193 | 2019 | Substrate supports with multi-layer structure including independent operated heater zones | 6 |
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