Johannes Marcus Maria Beltman

Inventor

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Work History

Patent OwnerApplications FiledYear
ASML NETHERLANDS B.V.
2
1
2015
2016

Inventor Addresses

AddressDuration
Knegsel, NLMar 03, 16 - Jan 19, 23

Technology Profile

Technology Matters
G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS 5
G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 1
G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR 7

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
2023/0016,6642023METROLOGY METHOD, TARGET AND SUBSTRATE0
2022/0057,1922022METROLOGY METHOD, TARGET AND SUBSTRATE1
112042392021Metrology method, target and substrate2
2020/0348,1252020METROLOGY METHOD, TARGET AND SUBSTRATE0
107253722020Method and apparatus for reticle optimization0

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