Akihito Anpo

Inventor

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Work History

Patent OwnerApplications FiledYear
NUFLARE TECHNOLOGY, INC.
2
4
4
10
4
4
6
2006
2007
2008
2010
2011
2012
2013

Inventor Addresses

AddressDuration
Machida, JPNov 05, 19 - Nov 05, 19
Tokyo, JPMar 08, 07 - Oct 20, 15

Technology Profile

Technology Matters
B82Y: SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE  OR TREATMENT OF NANO-STRUCTURES 4
G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 1
G03B: APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR 2

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
RE477072019Charged particle beam writing apparatus and charged particle beam writing method0
91640442015Charged particle beam lithography apparatus, inspection apparatus and inspection method of pattern writing data1
91417502015Charged particle beam writing apparatus and irradiation time apportionment method of charged particle beams for multiple writing1
90066912015Charged particle beam writing apparatus and charged particle beam writing method using a generated frame that surrounds a first data processing block0
88721412014Charged particle beam writing apparatus and charged particle beam writing method0

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