Ivelin Angelov
Inventor
Stats
- 5 US patents issued
- 18 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 5 US Patents Issued
- 18 US Applications Filed
- 774 Total Citation Count
- Sep 20, 2022 Most Recent Filing
- Nov 7, 2008 Earliest Filing
Work History
| Patent Owner | Applications Filed | Year |
|---|---|---|
| LAM RESEARCH CORPORATION | 3
2 7 | 2014
2015 2017 |
| NOVELLUS SYSTEMS, INC. | 1
3 1 | 2008
2011 2013 |
Inventor Addresses
| Address | Duration |
|---|---|
| San Jose, CA, US | Mar 31, 16 - Mar 16, 23 |
| Sunnyvale, CA, US | May 13, 10 - Jun 23, 16 |
Technology Profile
| Technology | Matters | |
|---|---|---|
| B23Q: | DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING | 2 |
| B24B: | MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING | 1 |
| C09K: | MATERIALS FOR APPLICATIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR | 1 |
Patents / Publication
| Patents / Publication # | Year of Publication / Issued | Title | Citations |
|---|---|---|---|
| 2023/0084,901 | 2023 | ULTRAHIGH SELECTIVE NITRIDE ETCH TO FORM FINFET DEVICES | 1 |
| 11342163 | 2022 | Variable depth edge ring for etch uniformity control | 0 |
| 10825659 | 2020 | Substrate processing chamber including multiple gas injection points and dual injector | 5 |
| 2020/0273,671 | 2020 | VARIABLE DEPTH EDGE RING FOR ETCH UNIFORMITY CONTROL | 0 |
| 10727089 | 2020 | Systems and methods for selectively etching film | 1 |
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