Kazuhiro Aiura

Inventor

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Work History

Patent OwnerApplications FiledYear
TOKYO ELECTRON LIMITED
15
4
2
2012
2013
2017

Inventor Addresses

AddressDuration
Fukuoka, JPDec 10, 20 - Oct 17, 23
Koshi City, JPJul 19, 12 - Nov 19, 20
Koshi, JPJun 23, 15 - Dec 24, 24
Koshi-Shi, JPDec 13, 12 - Dec 04, 14
Koshi-shi, JPJan 17, 13 - Jan 17, 13
Koshi-shi, Kumamoto, JPAug 09, 18 - Oct 03, 24
Kumamoto, JPFeb 13, 14 - Jul 18, 24

Technology Profile

Technology Matters
B01D: SEPARATION 1
B05B: SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES 2
B05C: APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 2

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
121762242024Substrate processing apparatus and substrate processing method0
121424962024Substrate processing apparatus and substrate processing method0
2024/0332,0412024SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD0
2024/0238,8482024SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD0
117911712023Substrate processing apparatus0

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