OLIVER ARP
Inventor
Stats
- 0 US patents issued
- 1 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 0 US Patents Issued
- 1 US Applications Filed
- 6 Total Citation Count
- Mar 28, 2016 Most Recent Filing
- Mar 28, 2016 Earliest Filing
Work History
| Patent Owner | Applications Filed | Year |
|---|---|---|
| CARL ZEISS SMT GMBH | 1
| 2016
|
Inventor Addresses
| Address | Duration |
|---|---|
| Aalen, DE | Jul 21, 16 - Jul 21, 16 |
Technology Profile
| Technology | Matters | |
|---|---|---|
| B08B: | CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL | 1 |
Patents / Publication
| Patents / Publication # | Year of Publication / Issued | Title | Citations |
|---|---|---|---|
| 2016/0207,078 | 2016 | OPTICAL ARRANGEMENT, IN PARTICULAR PLASMA LIGHT SOURCE OR EUV LITHOGRAPHY SYSTEM | 5 |
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