ZYGO CORPORATION

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
G01B MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS2299
 
  
 
G01D MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED BY A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR 1050
 
  
 
G02B OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS 7198
 
  
 
G03B APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR 691
 
  
 
G03F PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR 698
 
  
 
H01S DEVICES USING STIMULATED EMISSION587
 
  
 
G01N INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 3203
 
  
 
G01J MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY 276
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 2360
 
  
 
H02K DYNAMO-ELECTRIC MACHINES 2105

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9891078 Interferometric encoders using spectral analysisJul 14, 15Feb 13, 18[G01D]
9823061 Displacement measurement of deformable bodiesMay 05, 16Nov 21, 17[G01B]
9798130 Measuring topography of aspheric and other non-flat surfacesJan 08, 15Oct 24, 17[G01M, G02B, G01B]
9746348 Double pass interferometric encoder systemMar 24, 15Aug 29, 17[G01B, G01D, G03F]
9719777 Interferometer with real-time fringe-free imagingMay 28, 15Aug 01, 17[G01B]
9658129 Method and system for determining information about a transparent optical element comprising a lens portion and a plane parallel portionAug 13, 15May 23, 17[G01M, G01B]
9599534 Optical evaluation of lenses and lens moldsAug 13, 15Mar 21, 17[G01M, G01B]
9541381 Surface topography interferometer with surface colorFeb 06, 14Jan 10, 17[G01J, G01B]
9435640 Interferometer and method for measuring non-rotationally symmetric surface topography having unequal curvatures in two perpendicular principal meridiansDec 03, 14Sep 06, 16[G01B]
9411222 Photo-masks for lithographyApr 01, 15Aug 09, 16[G21K, H05G, G03F]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
8941842 Double pass interferometric encoder systemWithdrawnNov 08, 12Jan 27, 15[G01B, G03F, G01D]
2015/0002,852 COHERENCE SCANNING INTERFEROMETRY USING PHASE SHIFTED INTERFEROMETRTY SIGNALSAbandonedJun 24, 14Jan 01, 15[G01B]
2014/0268,105 OPTICAL DEFECT INSPECTION SYSTEMAbandonedMar 12, 14Sep 18, 14[G01N, G01B]
8456644 Measurement of changes in surfaces of objectsExpiredSep 02, 10Jun 04, 13[G01B]
2013/0128,249 Fiber Delivery for Metrology Systems Used in Lithography ToolsAbandonedNov 08, 12May 23, 13[G03F]
2013/0114,087 LOW COHERENCE INTERFEROMETRY USING ENCODER SYSTEMSAbandonedNov 08, 12May 09, 13[G01B]
2012/0224,183 INTERFEROMETRIC METROLOGY OF SURFACES, FILMS AND UNDERRESOLVED STRUCTURESAbandonedFeb 29, 12Sep 06, 12[G01B]
8248617 Interferometer for overlay measurementsExpiredApr 21, 09Aug 21, 12[G01B]
2012/0089,365 DATA INTERPOLATION METHODS FOR METROLOGY OF SURFACES, FILMS AND UNDERRESOLVED STRUCTURESAbandonedOct 06, 11Apr 12, 12[G06F, G01B]
8107084 Interference microscope with scan motion detection using fringe motion in monitor patternsExpiredJan 30, 09Jan 31, 12[G01B]
7978338 Compound reference interferometerExpiredAug 14, 09Jul 12, 11[G01B]
7564568 Phase shifting interferometry with multiple accumulationExpiredMar 01, 07Jul 21, 09[G01B]
7532330 Angle interferometersExpiredAug 15, 06May 12, 09[G01B]
7528961 Compensation of turbulent effects of gas in measurement paths of multi-axis interferometersExpiredApr 28, 06May 05, 09[G01B]
7495773 In situ determination of pixel mapping in interferometryExpiredFeb 24, 06Feb 24, 09[G01B]
7495770 Beam shear reduction in interferometry systemsExpiredAug 08, 06Feb 24, 09[G01B]
7488929 Perimeter detection using fiber optic sensorsExpiredAug 13, 04Feb 10, 09[G01J]
7489407 Error correction in interferometry systemsExpiredOct 06, 05Feb 10, 09[G01B]
2008/0278,730 METHODS AND SYSTEMS FOR DETERMINING OPTICAL PROPERTIS USING LOW COHERENCE INTERFERENCE SIGNALSAbandonedDec 04, 07Nov 13, 08[G01B]
7433049 Multi-axis interferometer with procedure and data processing for mirror mappingExpiredMar 17, 06Oct 07, 08[G01B]

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