WONIK IPS CO., LTD.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 1883
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 15347
 
  
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 3125
 
  
 
B05B SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES 262
 
  
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 234
 
  
 
H05H PLASMA TECHNIQUE 228
 
  
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 157

Top Patents (by citation)

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Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2018/0053,652 METHOD OF FORMING AMORPHOUS SILICON LAYERMar 30, 17Feb 22, 18[H01L]
2017/0369,994 APPARATUS FOR PROCESSING A WAFER AND METHOD OF DEPOSITING A THIN FILM USING THE SAMEJun 15, 17Dec 28, 17[C23C]
2017/0008,015 SUBSTRATE PROCESSING APPARATUSJun 29, 16Jan 12, 17[C23C, B05B]
2015/0249,004 METHOD OF FABRICATING NITRIDE FILM AND METHOD OF CONTROLLING COMPRESSIVE STRESS OF THE SAMEFeb 25, 15Sep 03, 15[C23C, H01L]
2015/0243,490 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHODFeb 26, 15Aug 27, 15[H01J]
2014/0373,782 SUBSTRATE SUPPORT APPARATUS AND SUBSTRATE PROCESS APPARATUS HAVING THE SAMEJun 20, 14Dec 25, 14[H01J]

Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9793476 Apparatus and method for treating a substrateOct 30, 12Oct 17, 17[C23C, H01L]
9732424 Gas injection apparatus and substrate processing apparatus using sameAug 24, 10Aug 15, 17[C23C, H01L]
9506146 Thin film vapor deposition method and thin film vapor deposition apparatusDec 29, 11Nov 29, 16[C23C]
9464353 Substrate processing apparatusNov 21, 13Oct 11, 16[C23C]
9269568 Method of manufacturing semiconductor device using the sameJul 03, 14Feb 23, 16[C23C, H01J, H01L]
8980742 Method of manufacturing multi-level metal thin film and apparatus for manufacturing the sameSep 04, 08Mar 17, 15[C23C, H01L]
8772077 Method of forming chalcogenide thin filmApr 16, 09Jul 08, 14[H01L]
8741096 Apparatus for semiconductor processingJun 28, 07Jun 03, 14[C23C, H01L, C23F]
8741160 Method for manufacturing solar cell and solar cell manufactured by the same methodDec 20, 10Jun 03, 14[H01L]
8673676 Surface processing method of silicon substrate for solar cell, and manufacturing method of solar cellDec 20, 10Mar 18, 14[H01L]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2016/0247,675 METHOD FOR MANUFACTURING THIN FILMAbandonedJun 18, 13Aug 25, 16[H01L]
2016/0247,676 METHOD FOR MANUFACTURING THIN FILMAbandonedJun 18, 13Aug 25, 16[H01L]
2014/0034,138 SEMICONDUCTOR MANUFACTURING DEVICE AND MANUFACTURING METHOD THEREOFAbandonedApr 12, 12Feb 06, 14[F17D]
2013/0291,798 THIN FILM DEPOSITION APPARATUS AND SUBSTRATE TREATMENT SYSTEM INCLUDING THE SAMEAbandonedJan 03, 12Nov 07, 13[C23C]
2013/0180,454 THIN FILM DEPOSITION APPARATUSAbandonedSep 16, 11Jul 18, 13[C23C]
2013/0149,808 METHOD OF FABRICATING A SOLAR CELLAbandonedJan 17, 13Jun 13, 13[H01L]
2012/0222,616 SHOWER HEAD ASSEMBLY AND THIN FILM DEPOSITION APPARATUS COMPRISING SAMEAbandonedSep 13, 10Sep 06, 12[C23C, B05B]
2012/0152,172 GAS-DISCHARGING DEVICE AND SUBSTRATE-PROCESSING APPARATUS USING SAMEAbandonedAug 24, 10Jun 21, 12[C23C]
2011/0114,114 CLEANING METHOD OF APPARATUS FOR DEPOSITING CARBON CONTAINING FILMAbandonedJul 14, 08May 19, 11[B08B]
2011/0083,735 SOLAR CELL AND METHOD OF FABRICATING THE SAMEAbandonedOct 12, 10Apr 14, 11[H01L]
2011/0021,035 DEPOSITION APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAMEAbandonedJul 23, 10Jan 27, 11[C23C, H01L]
7785664 Method of depositing thin filmExpiredDec 14, 05Aug 31, 10[C23C]
2010/0190,341 APPARATUS, METHOD FOR DEPOSITING THIN FILM ON WAFER AND METHOD FOR GAP-FILLING TRENCH USING THE SAMEAbandonedJul 14, 08Jul 29, 10[H01L]
7638437 In-situ thin-film deposition methodExpiredOct 27, 05Dec 29, 09[H01L]
6740166 Thin film deposition apparatus for semiconductorExpiredNov 30, 00May 25, 04[C23C, H01L]
6573184 Apparatus and method for depositing thin film on wafer using atomic layer depositionExpiredMar 07, 02Jun 03, 03[H01L]

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