VINOTAL GMBH (NOW KNOWN AS RUDOLPH TECHNOLOGIES GERMANY GMBH)
Patent Owner
Stats
- 10 US PATENTS IN FORCE
- 1 US APPLICATIONS PENDING
- Sep 08, 2016 most recent publication
Details
- 10 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 408 Total Citation Count
- Jun 28, 1994 Earliest Filing
- 2 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
Rank in Class
Top Patents (by citation)
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Recent Publications
Publication #
Title
Filing Date
Pub Date
Intl Class
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
8289509 Inspection device and inspection method for the optical examination of object surfaces, particularly of wafer surfacesJan 27, 10Oct 16, 12[G03B]
6935201 Measurement configuration including a vehicle and method for performing measurements with the measurement configuration at various locationsAug 11, 03Aug 30, 05[G01M]
6633372 Method for inspection of an analyzed surface and surface scanning analyzerMay 30, 01Oct 14, 03[G01N]
5502567 Micropolarimeter, microsensor system and method of characterizing thin filmsJun 28, 94Mar 26, 96[G01J]
Expired/Abandoned/Withdrawn Patents
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