VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
Patent Owner
Stats
- 642 US PATENTS IN FORCE
- 19 US APPLICATIONS PENDING
- Mar 20, 2018 most recent publication
Details
- 642 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 18,712 Total Citation Count
- May 16, 1980 Earliest Filing
- 375 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
Rank in Class
Top Patents (by citation)
Upgrade to the Professional Level to View Top Patents for this Owner. Learn More |
Recent Publications
Publication #
Title
Filing Date
Pub Date
Intl Class
2017/0247,810 SYSTEM FOR MEASURING MATERIAL THICKNESSES AT HIGH TEMPERATURESOct 16, 15Aug 31, 17[G01N, C30B]
2017/0178,866 APPARATUS AND TECHNIQUES FOR TIME MODULATED EXTRACTION OF AN ION BEAMDec 22, 15Jun 22, 17[H01J, C23C]
2017/0157,909 PLANAR END EFFECTOR AND METHOD OF MAKING A PLANAR END EFFECTORFeb 24, 17Jun 08, 17[B25J, B32B]
2017/0092,473 IN-SITU PLASMA CLEANING OF PROCESS CHAMBER ELECTROSTATIC ELEMENTS HAVING VARIED GEOMETRIESSep 28, 15Mar 30, 17[H01J, H01L]
2016/0379,844 TECHNIQUES AND APPARATUS FOR ANISOTROPIC METAL ETCHINGSep 13, 16Dec 29, 16[H01J, H01L, C23F]
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
9922795 High brightness ion beam extraction using bias electrodes and magnets proximate the extraction apertureJul 27, 15Mar 20, 18[H01J]
9916966 Apparatus and method for minimizing thermal distortion in electrodes used with ion sourcesJan 26, 17Mar 13, 18[H01J]
9911910 High temperature superconductor tape with alloy metal coatingAug 29, 13Mar 06, 18[H01L, H01B]
9899188 Selective processing of a workpiece using ion beam implantation and workpiece rotationJul 23, 15Feb 20, 18[H01J, C23C, H01L]
9899242 Device and method for substrate heating during transportApr 06, 15Feb 20, 18[H01L, F27B, F27D]
9891599 Proportional integral derivative control incorporating multiple actuatorsFeb 01, 16Feb 13, 18[G05B, G06F, B25J]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2016/0002,784 METHOD AND APPARATUS FOR DEPOSITING A MONOLAYER ON A THREE DIMENSIONAL STRUCTUREAbandonedJul 07, 14Jan 07, 16[C23C]
2015/0290,815 PLANAR END EFFECTOR AND METHOD OF MAKING A PLANAR END EFFECTORAbandonedApr 11, 14Oct 15, 15[H01L, B25J, B32B]
2015/0228,445 METHOD AND APPARATUS FOR THREE DIMENSIONAL ION IMPLANTATIONAbandonedFeb 13, 14Aug 13, 15[H01J]
2015/0214,339 TECHNIQUES FOR ION IMPLANTATION OF NARROW SEMICONDUCTOR STRUCTURESAbandonedJan 24, 14Jul 30, 15[H01L]
2014/0352,769 Edge Counter-Doped Solar Cell With Low Breakdown VoltageAbandonedMay 29, 13Dec 04, 14[H01L]
2014/0272,181 APPARATUS AND METHOD FOR ION IMPLANTATION IN A MAGNETIC FIELDAbandonedMar 14, 13Sep 18, 14[G11B]
2014/0273,330 METHOD OF FORMING SINGLE SIDE TEXTURED SEMICONDUCTOR WORKPIECESAbandonedMar 12, 13Sep 18, 14[H01L]
2014/0169,402 TEMPERATURE MONITOR FOR DEVICES IN AN ION IMPLANT APPARATUSAbandonedDec 10, 13Jun 19, 14[C23C, G01N, G01B]
2014/0154,834 USE OF DOPANTS WITH DIFFERENT DIFFUSIVITIES FOR SOLAR CELL MANUFACTUREAbandonedMay 09, 13Jun 05, 14[H01L]
Top Inventors for This Owner
Upgrade to the Professional Level to View Top Inventors for this Owner. Learn More |
We are sorry but your current selection exceeds the maximum number of comparisons () for this membership level. Upgrade to our Level for up to -1 comparisons!
We are sorry but your current selection exceeds the maximum number of portfolios (0) for this membership level. Upgrade to our Level for up to -1 portfolios!.