ULVAC, INC.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 11622
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 108255
 
  
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 4485
 
  
 
B05D PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 1473
 
  
 
B41J TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS 1191
 
  
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 1125
 
  
 
G01N INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 11195
 
  
 
B05C APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 1035
 
  
 
B25J MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES 949
 
  
 
B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYERS FOR LOADING OR TIPPING; SHOP CONVEYER SYSTEMS; PNEUMATIC TUBE CONVEYERS 859

Top Patents (by citation)

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Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2018/0057,928 SPUTTERING APPARATUSJul 15, 15Mar 01, 18[C23C, H01J, H01L]
2018/0057,929 Method of Depositing Aluminum Oxide Film, Method of Forming the Same, and Sputtering ApparatusFeb 16, 16Mar 01, 18[C23C, H01J, H01L]
2018/0008,944 Mixing DeviceOct 07, 15Jan 11, 18[G01N, B01F]
2017/0346,418 CHUCKING DEVICE AND VACUUM PROCESSING APPARATUSAug 10, 17Nov 30, 17[H01J, C23C, H01L, H02N]
2017/0204,509 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHODJul 28, 15Jul 20, 17[C23C, H01J]
2017/0204,510 SUBSTRATE PROCESSING DEVICEJul 23, 15Jul 20, 17[C23C, H01J, H05K]
2017/0178,875 INSULATOR TARGETJun 02, 15Jun 22, 17[H01J]
2017/0170,047 PLASMA TREATMENT DEVICE AND WAFER TRANSFER TRAYJan 21, 15Jun 15, 17[H01J, H01L]
2017/0133,581 METHOD OF MANUFACTURING MULTI-LAYERED FILM AND MULTI-LAYERED FILMJun 11, 15May 11, 17[C23C, H01L, C01G]
2017/0104,147 PZT THIN FILM LAMINATE AND MANUFACTURING METHOD THEREOFDec 22, 16Apr 13, 17[C23C, H01L]

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9903012 Film formation method and film formation apparatusDec 18, 12Feb 27, 18[C23C]
9891731 Touch panel, method of producing the same, optical thin film substrate and method of producing the sameJul 10, 14Feb 13, 18[G06F, G02B]
9882202 Positive electrode for lithium-sulfur secondary battery and method of forming the sameOct 14, 11Jan 30, 18[H01M]
9851453 Method of manufacturing radiological image conversion panel and radiological image conversion panelMay 15, 15Dec 26, 17[C23C, G21K, G01T]
9837251 Plasma etching method, plasma etching device, plasma processing method, and plasma processing deviceFeb 25, 15Dec 05, 17[H01J, C23C, C09K, H01L, C03C, H02N, H05F]
9806229 Deep ultraviolet LED and method for manufacturing the sameOct 24, 14Oct 31, 17[H01L]
9777376 Film-forming apparatusJul 03, 14Oct 03, 17[C23C, B05D]
9779958 Method of, and apparatus for, forming hard maskDec 04, 14Oct 03, 17[C23C, H01L]
9759485 Vacuum freeze-drying apparatus and frozen particle manufacturing methodApr 26, 13Sep 12, 17[A23L, F26B, B01J, B01D]
9728677 Deep ultraviolet LED and method for manufacturing the sameOct 24, 14Aug 08, 17[H01L]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2017/0066,127 TRANSFER DEVICE AND VACUUM APPARATUSAbandonedApr 28, 16Mar 09, 17[H01L, B25J]
2017/0001,239 Vacuum Melting and Casting ApparatusAbandonedFeb 10, 15Jan 05, 17[F27D, B22D]
2017/0005,312 Lithium-Sulfur Secondary BatteryAbandonedOct 15, 14Jan 05, 17[H01M]
2016/0300,938 Insulated Gate Bipolar Transistor and Production Method ThereofAbandonedDec 02, 14Oct 13, 16[H01L]
2016/0285,135 LITHIUM-SULFUR SECONDARY BATTERYAbandonedOct 15, 14Sep 29, 16[H01M]
2016/0013,011 ION IRRADIATION DEVICE AND ION IRRADIATION METHODAbandonedAug 24, 15Jan 14, 16[H01J]
2015/0200,078 PLASMA ETCHING APPARATUSAbandonedMar 27, 15Jul 16, 15[H01J, C23F]
2015/0200,082 METHOD OF MANUFACTURING METAL HYDROXIDES AND METHOD OF MANUFACTURING ITO SPUTTERING TARGETAbandonedApr 16, 13Jul 16, 15[H01J, C25B]
2015/0056,373 DEPOSITION METHOD AND DEPOSITION APPARATUSAbandonedJul 25, 13Feb 26, 15[C23C, H01J]
2014/0332,959 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICEAbandonedSep 21, 12Nov 13, 14[H01L]
2014/0318,608 SOLAR CELL MANUFACTURING METHOD AND SOLAR CELLAbandonedOct 11, 12Oct 30, 14[H01L]
2014/0287,588 Deposition Method and Deposition ApparatusAbandonedApr 26, 13Sep 25, 14[H01L]
2014/0158,301 VACUUM PROCESSING DEVICE AND VACUUM PROCESSING METHODAbandonedFeb 11, 14Jun 12, 14[B01J]
2014/0075,997 SILICON PURIFICATION METHOD AND SILICON PURIFICATION DEVICEAbandonedNov 08, 13Mar 20, 14[C01B]
2014/0048,413 FILM-FORMING APPARATUSAbandonedOct 23, 13Feb 20, 14[C23C]
2013/0333,619 ORGANIC THIN FILM FORMING APPARATUSAbandonedJun 07, 13Dec 19, 13[B05C]
2013/0284,701 METHOD OF MANUFACTURING DIELECTRIC DEVICE AND ASHING METHODAbandonedDec 19, 11Oct 31, 13[H01B]
2013/0257,205 ECCENTRIC CIRCLING DRIVE DEVICEAbandonedOct 05, 11Oct 03, 13[H02K]
2013/0247,620 SILICON REFINING DEVICE AND SILICON REFINING METHODAbandonedMay 28, 13Sep 26, 13[C01B]
2013/0239,993 FILM-FORMING APPARATUS AND METHOD FOR CLEANING FILM-FORMING APPARATUSAbandonedNov 22, 11Sep 19, 13[C23C]

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