TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACURING GMBH

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
G02B OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS 7198
 
  
 
H05G X-RAY TECHNIQUE 733
 
  
 
H01S DEVICES USING STIMULATED EMISSION587
 
  
 
B23K SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM 192
 
  
 
G01N INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 1205
 
  
 
G06K RECOGNITION OF DATA; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS 1197
 
  
 
G21K TECHNIQUES FOR HANDLING PARTICLES OR ELECTROMAGNETIC RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA- OR X-RAY MICROSCOPES 145
 
  
 
H05H PLASMA TECHNIQUE 129

Top Patents (by citation)

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Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2017/0160,527 Elongating a Travel Path of a Light Beam by an Optical Delay DeviceFeb 16, 17Jun 08, 17[G02B, H05G]

Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9642235 EUV radiation generating device including a beam influencing optical unitDec 28, 15May 02, 17[H05G, H01S]
9596743 Beam guiding apparatusMar 11, 16Mar 14, 17[G02B, H05H, H05G, H01S]
9575324 Beam guiding apparatusMar 11, 16Feb 21, 17[G21K, G02B, H05G]
9323026 Optical arrangement, optical module, and method for correctly positioning an optical module in a housingMar 15, 13Apr 26, 16[G02B, G03F, G06K]
9306367 Device for amplifying a laser beamMar 14, 13Apr 05, 16[H01S]
9129717 EUV excitation light source with a laser beam source and a beam guide device for manipulating the laser beamMar 15, 13Sep 08, 15[G21K, B23K, G02B, H05G, H01S]
9016881 Beam guide and method for adjusting the opening angle of a laser beamMar 15, 13Apr 28, 15[G02B, H05G]
8847182 EUV radiation generating apparatus and operating methodsMar 15, 13Sep 30, 14[G01N, H05G]
8681427 System and method for separating a main pulse and a pre-pulse beam from a laser sourceJun 27, 12Mar 25, 14[G02B]

Expired/Abandoned/Withdrawn Patents

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