TOUCH MICRO-SYSTEM TECHNOLOGY CORP.

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2013/0278,986 ANNULAR STRUCTURE AND MICRO SCANNING MIRRORAbandonedJul 06, 12Oct 24, 13[G02B]
2013/0266,774 PACKAGE STRUCTURE AND PACKAGING METHODAbandonedJun 07, 12Oct 10, 13[C09J, B32B]
2013/0258,293 Phase Modulation Module and Projector Comprising the SameAbandonedMar 13, 13Oct 03, 13[G02F]
2013/0169,109 COMB ELECTRODE STRUCTUREAbandonedApr 11, 12Jul 04, 13[H02N]
2012/0086,086 MEMS DEVICE AND COMPOSITE SUBSTRATE FOR AN MEMS DEVICEAbandonedJun 27, 11Apr 12, 12[H01L]
2011/0309,057 LASER HEATING APPARATUS FOR METAL EUTECTIC BONDINGAbandonedJun 21, 10Dec 22, 11[B23K]
7938977 Method of modulating resonant frequency of torsional MEMS deviceExpiredFeb 10, 10May 10, 11[H02K, H02N, C23F]
2009/0273,005 OPTO-ELECTRONIC PACKAGE STRUCTURE HAVING SILICON-SUBSTRATE AND METHOD OF FORMING THE SAMEAbandonedJul 09, 09Nov 05, 09[H01L]
6495893 Micro-mechanical actuator including auxiliary lever to enlarge travel range of actuated objectExpiredApr 27, 01Dec 17, 02[H01L]

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