TOKYO ELECTRON SAGAMI LIMITED

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
F27D DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE 421
 
  
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 1100
 
  
 
F16J PISTONS; CYLINDERS; PRESSURE VESSELS IN GENERAL; SEALINGS149
 
  
 
F23D BURNERS 131
 
  
 
F27B FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS123
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 1361

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
5651670 Heat treatment method and apparatus thereofNov 16, 94Jul 29, 97[F27D]
5431561 Method and apparatus for heat treatingDec 14, 93Jul 11, 95[F27D]
5407350 Heat-treatment apparatusFeb 12, 93Apr 18, 95[F27D]
5330352 Oxidation/diffusion processing apparatusJan 29, 93Jul 19, 94[F27B]
5318633 Heat treating apparatusMar 06, 92Jun 07, 94[C23C]
5316472 Vertical boat used for heat treatment of semiconductor wafer and vertical heat treatment apparatusDec 16, 92May 31, 94[F27D]
5297956 Method and apparatus for heat treatingNov 29, 91Mar 29, 94[F23D]
5239614 Substrate heating method utilizing heating element control to achieve horizontal temperature gradientNov 14, 91Aug 24, 93[H01L]
5133561 Sealing deviceFeb 26, 91Jul 28, 92[F16J]

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
5388944 Vertical heat-treating apparatus and heat-treating process by using the vertical heat-treating apparatusExpiredFeb 04, 93Feb 14, 95[B65G]
5131842 Corrosion resistant thermal treating apparatusExpiredJun 26, 90Jul 21, 92[C23C, H05B, F27D]
5048800 Vertical heat treatment apparatusExpiredAug 07, 90Sep 17, 91[C21D]
5015330 Film forming method and film forming deviceExpiredFeb 28, 90May 14, 91[H01L, C03C, B05D, B44C]

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