TOKYO ELECTRON LIMITED

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology MATTERS Rank in Class
 
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 2609 16
 
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 1273 2
 
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 549 5
 
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 416 1
 
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 394 1
 
 
G06F ELECTRIC DIGITAL DATA PROCESSING 280 207
 
 
G01R MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES 261 27
 
 
G03F PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR 224 18
 
 
B05C APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 209 1
 
 
B05D PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 148 6
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Top Patents (by citation)

Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2018/0032,092 LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD Jul 26, 17 Feb 01, 18 [H01L, G05D]
2018/0033,608 Method and Apparatus for Forming Nitride Film Jul 26, 17 Feb 01, 18 [C23C, H01L]
2018/0033,618 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD Jul 26, 17 Feb 01, 18 [H01J, H01L]
2018/0033,656 SUBSTRATE PROCESSING APPARATUS AND NOZZLE Jul 24, 17 Feb 01, 18 [H01L]
2018/0033,663 CARRIER TRANSPORT DEVICE AND CARRIER TRANSPORT METHOD Dec 24, 15 Feb 01, 18 [H01L]
2018/0033,958 METHOD FOR ETCHING MAGNETIC LAYER Mar 01, 16 Feb 01, 18 [H01L]
2018/0021,804 COATING TREATMENT METHOD, COMPUTER STORAGE MEDIUM, AND COATING TREATMENT APPARATUS Feb 04, 16 Jan 25, 18 [B05D, H01L]
2018/0023,871 TEMPERATURE CONTROL METHOD Sep 12, 17 Jan 25, 18 [F04C, H01J, H01L, F25B]
2018/0025,899 BACK-SIDE FRICTION REDUCTION OF A SUBSTRATE Jul 14, 17 Jan 25, 18 [H01L]
2018/0025,917 METHOD OF FABRICATING SEMICONDUCTOR DEVICE, VACUUM PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS Jul 19, 17 Jan 25, 18 [H01L]
2018/0025,923 PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD Sep 29, 17 Jan 25, 18 [C23C, H01J, H01L]
2018/0025,927 SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING METHOD, AND STORAGE MEDIUM Jul 14, 17 Jan 25, 18 [H01L]
2018/0026,042 THREE-DIMENSIONAL SEMICONDUCTOR DEVICE AND METHOD OF FABRICATION Jul 19, 17 Jan 25, 18 [H01L]
2018/0015,510 PROCESSING APPARATUS AND PROCESSING METHOD, AND GAS CLUSTER GENERATING APPARATUS AND GAS CLUSTER GENERATING METHOD Sep 26, 17 Jan 18, 18 [B08B, H01J, H01L]
2018/0019,102 METHOD FOR RF POWER DISTRIBUTION IN A MULTI-ZONE ELECTRODE ARRAY Jul 12, 17 Jan 18, 18 [C23C, H01J]
2018/0019,103 MICROWAVE CONTROL METHOD Jul 11, 17 Jan 18, 18 [H01J]
2018/0019,107 FOCUS RING REPLACEMENT METHOD AND PLASMA PROCESSING SYSTEM Jul 06, 17 Jan 18, 18 [B08B, H01J]
2018/0019,112 LIQUID PROCESSING METHOD, MEMORY MEDIUM AND LIQUID PROCESSING APPARATUS Sep 27, 17 Jan 18, 18 [G03F, H01L]
2018/0019,113 MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM DEPOSITION APPARATUS Sep 25, 17 Jan 18, 18 [C23C, G03F, H01L]
2018/0019,114 METHOD FOR DEPOSITING A SILICON NITRIDE FILM Jun 29, 17 Jan 18, 18 [C23C, H01L]
2018/0019,140 BONDING APPARATUS Jul 10, 17 Jan 18, 18 [H01L]
2018/0019,145 SUBSTRATE PROCESSING APPARATUS Aug 15, 17 Jan 18, 18 [H01L]
2018/0019,153 SUBSTRATE TRANSFER DEVICE AND BONDING SYSTEM Jul 07, 17 Jan 18, 18 [H01L]
2018/0019,225 Bonding System Jul 07, 17 Jan 18, 18 [H01L]
2018/0019,226 BONDING SYSTEM Jul 07, 17 Jan 18, 18 [B32B, H01L]
2018/0010,252 SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND RECORDING MEDIUM Jun 28, 17 Jan 11, 18 [C23C]
2018/0012,735 GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING SYSTEM AND GAS SUPPLY METHOD Jul 10, 17 Jan 11, 18 [F16K, H01J, H01L, G05D]
2018/0012,736 PLASMA PROCESSING APPARATUS Jul 27, 17 Jan 11, 18 [H01J]
2018/0012,754 WET ETCHING METHOD, SUBSTRATE LIQUID PROCESSING APPARATUS, AND STORAGE MEDIUM Jan 25, 16 Jan 11, 18 [H01L]
2018/0012,756 Method of Forming Insulating Film Jun 30, 17 Jan 11, 18 [H01L]
2018/0012,763 DOPING METHOD, DOPING APPARATUS, AND SEMICONDUCTOR ELEMENT MANUFACTURING METHOD Dec 14, 15 Jan 11, 18 [H01J, H01L]
2018/0012,777 SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING METHOD AND STORAGE MEDIUM Jun 28, 17 Jan 11, 18 [B05C, H01L]
2018/0012,781 SUBSTRATE PROCESSING APPARATUS Sep 25, 17 Jan 11, 18 [H01L]
2018/0012,844 RUTHENIUM WIRING AND MANUFACTURING METHOD THEREOF Jun 29, 17 Jan 11, 18 [H01L]

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9878267 Solution treatment apparatus and solution treatment method Jun 30, 17 Jan 30, 18 [G03F, H01L, B01D]
9881784 Substrate processing method, substrate processing apparatus, and storage medium Oct 14, 15 Jan 30, 18 [H01L]
9881799 Substrate liquid processing apparatus, substrate liquid processing method, and computer-readable storage medium Jan 21, 16 Jan 30, 18 [H01L]
9881804 Method and system for high precision etching of substrates Jan 26, 16 Jan 30, 18 [H01J, H01L]
9881806 Method of manufacturing a semiconductor device Mar 14, 16 Jan 30, 18 [H01J, H01L]
9881807 Method for atomic layer etching Mar 29, 16 Jan 30, 18 [H01J, H01L]
9881815 Substrate cleaning method, substrate cleaning device, and vacuum processing device Feb 25, 13 Jan 30, 18 [B08B, H01L]
9882026 Method for forming a nanowire structure Jan 12, 16 Jan 30, 18 [H01L]
9882124 Etching method and substrate processing apparatus Feb 09, 15 Jan 30, 18 [H01L, C21D]
9875881 Plasma processing apparatus and plasma processing method Feb 19, 14 Jan 23, 18 [C23C, H01J, H01L]
9875882 Microwave plasma processing apparatus, slot antenna, and semiconductor device Jul 09, 14 Jan 23, 18 [C23F, C23C, H01J, H01L]
9875915 Method for removing metal contamination and apparatus for removing metal contamination Dec 21, 15 Jan 23, 18 [C23C, H01J, H01L]
9875916 Method of stripping photoresist on a single substrate system Nov 06, 12 Jan 23, 18 [G03F, H01L]
9869941 Substrate cleaning method, substrate cleaning apparatus, and computer-readable storage medium Dec 14, 16 Jan 16, 18 [B08B, G03F, G01B, H01L]
9870898 Plasma processing method and plasma processing apparatus Feb 09, 16 Jan 16, 18 [H01J]
9870901 Method of producing processing condition of plasma processing apparatus, and plasma processing apparatus May 04, 16 Jan 16, 18 [H01J, H01L]
9870914 Substrate processing apparatus and substrate processing method Aug 02, 16 Jan 16, 18 [H01L]
9862007 Substrate liquid processing apparatus and method, and computer-readable recording medium with substrate liquid processing program recorded therein Mar 24, 15 Jan 09, 18 [B24B, B08B, C11D, H01L, B01D]
9863897 X-ray nondestructive testing device Sep 03, 15 Jan 09, 18 [G01B, G01N]
9863977 Method of contacting substrate with probe card Jul 18, 13 Jan 09, 18 [G01R]
9865452 Substrate processing method and substrate processing apparatus Mar 30, 16 Jan 09, 18 [H01L]
9865454 Substrate processing apparatus and substrate processing method Oct 24, 14 Jan 09, 18 [C23C, H01J, H01L]
9865457 Nitride film forming method using nitrading active species Nov 02, 16 Jan 09, 18 [H01L]
9865467 Recess filling method and processing apparatus Oct 21, 15 Jan 09, 18 [C23C, H01L, C30B]
9865471 Etching method and etching apparatus Apr 20, 16 Jan 09, 18 [H01J, H01L]
9865483 Substrate liquid processing method, substrate liquid processing apparatus, and recording medium Sep 11, 15 Jan 09, 18 [B08B, H01L]
9865488 Processing method and processing apparatus Oct 31, 13 Jan 09, 18 [H01L, B25J]
9865499 Method and apparatus for gap fill using deposition and etch processes Jun 17, 16 Jan 09, 18 [C23C, H01L]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2017/0025,308 METHOD OF CLEANING BOTTOM OF VIA HOLE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE ABAN Mar 09, 16 Jan 26, 17 [H01L]
2016/0363,868 LINE PATTERN COLLAPSE MITIGATION THROUGH GAP-FILL MATERIAL APPLICATION ABAN Jul 29, 16 Dec 15, 16 [G03F]
2016/0351,398 SEMICONDUCTOR ELEMENT MANUFACTURING METHOD ABAN May 26, 16 Dec 01, 16 [H01J, H01L]
2016/0336,201 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD ABAN Jul 26, 16 Nov 17, 16 [B08B, H01L]
2016/0326,646 METHOD FOR FORMING MANGANESE-CONTAINING FILM ABAN Jul 18, 16 Nov 10, 16 [C23C, H01L]
2016/0307,784 SUBSTRATE PROCESSING SYSTEM ABAN Apr 19, 16 Oct 20, 16 [G05B, H01L]
2016/0280,536 Method for Manufacturing Hollow Structure ABAN Mar 17, 14 Sep 29, 16 [B81C]
2016/0276,147 Silicon Nitride Film Forming Method and Silicon Nitride Film Forming Apparatus ABAN Mar 10, 16 Sep 22, 16 [C23C, H01L]
2016/0247,765 SEMICONDUCTOR DEVICE, PLATING METHOD, PLATING SYSTEM AND RECORDING MEDIUM ABAN Feb 19, 16 Aug 25, 16 [C23C, H01L]
2016/0203,998 ETCHING METHOD ABAN Sep 02, 14 Jul 14, 16 [H01L]
2016/0189,963 DOPING METHOD AND SEMICONDUCTOR ELEMENT MANUFACTURING METHOD ABAN Dec 21, 15 Jun 30, 16 [H01L]
2016/0181,109 SEMICONDUCTOR DEVICE MANUFACTURING METHOD ABAN Feb 26, 16 Jun 23, 16 [H01L]
2016/0163,533 TANTALUM OXIDE FILM REMOVAL METHOD AND APPARATUS ABAN Apr 09, 14 Jun 09, 16 [H01L]
2016/0049,292 Semiconductor Device Manufacturing Method ABAN Aug 05, 15 Feb 18, 16 [H01L]
2016/0045,942 METHOD AND APPARATUS FOR REMOVING RESIDUE LAYER ABAN Aug 17, 15 Feb 18, 16 [B08B]
2016/0040,287 Tungsten Film Forming Method ABAN Aug 06, 15 Feb 11, 16 [C23C]
2016/0035,584 PLANARIZATION METHOD, SUBSTRATE TREATMENT SYSTEM, MRAM MANUFACTURING METHOD, AND MRAM ELEMENT ABAN Sep 04, 15 Feb 04, 16 [H01L]
2016/0035,604 Substrate Processing Device and Substrate Processing Device-Use Coupling Member ABAN Jan 31, 14 Feb 04, 16 [H01L, B25J]
2016/0027,287 IDENTIFICATION SYSTEM ABAN Jul 23, 15 Jan 28, 16 [G08B]
2016/0017,484 CARBON FILM FORMATION METHOD, AND CARBON FILM ABAN Jan 30, 14 Jan 21, 16 [C23C]

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