TOKYO ELECTRON LIMITED
Patent Owner
Back to search results Back to News FeedStats
- 62 5,407 US PATENTS IN FORCE
- 993 US APPLICATIONS PENDING
- Feb 01, 2018 most recent publication
Details
- 5,407 Issued Patents
- 1,210 Issued in last 3 years
- 873 Published in last 3 years
- 102,206 Total Citation Count
- Nov 06, 1978 Earliest Filing
- 3,568 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
MATTERS
Rank in Class
Intl Class
Technology
MATTERS
Rank in Class
- No Technologies to Display
Top Patents (by citation)
Upgrade to the Premium Level to View Top Patents for this Owner. Learn More |
Patent #
Title
Filing Date
Issue Date
Intl Class
CITATIONS
5382311
Stage having electrostatic chuck and plasma processing apparatus using same
Dec 17, 93
Jan 17, 95
[H01L]
285
5821763
Test probe for high density integrated circuits, methods of fabrication thereof and methods of use thereof
Nov 22, 96
Oct 13, 98
[G01R]
238
5635846
Test probe having elongated conductor embedded in an elostomeric material which is mounted on a space transformer
Apr 30, 93
Jun 03, 97
[G01R]
206
5234529
Plasma generating apparatus employing capacitive shielding and process for using such apparatus
Oct 10, 91
Aug 10, 93
[C23F, C23C]
203
5306666
Process for forming a thin metal film by chemical vapor deposition
Jul 21, 93
Apr 26, 94
[H01L]
200
- No Patents to Display
Recent Publications
Publication #
Title
Filing Date
Pub Date
Intl Class
2018/0032,092
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
Jul 26, 17
Feb 01, 18
[H01L, G05D]
2018/0033,618
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Jul 26, 17
Feb 01, 18
[H01J, H01L]
2018/0021,804
COATING TREATMENT METHOD, COMPUTER STORAGE MEDIUM, AND COATING TREATMENT APPARATUS
Feb 04, 16
Jan 25, 18
[B05D, H01L]
2018/0025,917
METHOD OF FABRICATING SEMICONDUCTOR DEVICE, VACUUM PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
Jul 19, 17
Jan 25, 18
[H01L]
2018/0025,923
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Sep 29, 17
Jan 25, 18
[C23C, H01J, H01L]
2018/0025,927
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING METHOD, AND STORAGE MEDIUM
Jul 14, 17
Jan 25, 18
[H01L]
2018/0026,042
THREE-DIMENSIONAL SEMICONDUCTOR DEVICE AND METHOD OF FABRICATION
Jul 19, 17
Jan 25, 18
[H01L]
2018/0015,510
PROCESSING APPARATUS AND PROCESSING METHOD, AND GAS CLUSTER GENERATING APPARATUS AND GAS CLUSTER GENERATING METHOD
Sep 26, 17
Jan 18, 18
[B08B, H01J, H01L]
2018/0019,102
METHOD FOR RF POWER DISTRIBUTION IN A MULTI-ZONE ELECTRODE ARRAY
Jul 12, 17
Jan 18, 18
[C23C, H01J]
2018/0019,107
FOCUS RING REPLACEMENT METHOD AND PLASMA PROCESSING SYSTEM
Jul 06, 17
Jan 18, 18
[B08B, H01J]
2018/0019,112
LIQUID PROCESSING METHOD, MEMORY MEDIUM AND LIQUID PROCESSING APPARATUS
Sep 27, 17
Jan 18, 18
[G03F, H01L]
2018/0019,113
MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM DEPOSITION APPARATUS
Sep 25, 17
Jan 18, 18
[C23C, G03F, H01L]
2018/0010,252
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND RECORDING MEDIUM
Jun 28, 17
Jan 11, 18
[C23C]
2018/0012,735
GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING SYSTEM AND GAS SUPPLY METHOD
Jul 10, 17
Jan 11, 18
[F16K, H01J, H01L, G05D]
2018/0012,754
WET ETCHING METHOD, SUBSTRATE LIQUID PROCESSING APPARATUS, AND STORAGE MEDIUM
Jan 25, 16
Jan 11, 18
[H01L]
2018/0012,763
DOPING METHOD, DOPING APPARATUS, AND SEMICONDUCTOR ELEMENT MANUFACTURING METHOD
Dec 14, 15
Jan 11, 18
[H01J, H01L]
2018/0012,777
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING METHOD AND STORAGE MEDIUM
Jun 28, 17
Jan 11, 18
[B05C, H01L]
- No Publications to Display
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
9878267
Solution treatment apparatus and solution treatment method
Jun 30, 17
Jan 30, 18
[G03F, H01L, B01D]
9881784
Substrate processing method, substrate processing apparatus, and storage medium
Oct 14, 15
Jan 30, 18
[H01L]
9881799
Substrate liquid processing apparatus, substrate liquid processing method, and computer-readable storage medium
Jan 21, 16
Jan 30, 18
[H01L]
9881804
Method and system for high precision etching of substrates
Jan 26, 16
Jan 30, 18
[H01J, H01L]
9881815
Substrate cleaning method, substrate cleaning device, and vacuum processing device
Feb 25, 13
Jan 30, 18
[B08B, H01L]
9875881
Plasma processing apparatus and plasma processing method
Feb 19, 14
Jan 23, 18
[C23C, H01J, H01L]
9875882
Microwave plasma processing apparatus, slot antenna, and semiconductor device
Jul 09, 14
Jan 23, 18
[C23F, C23C, H01J, H01L]
9875915
Method for removing metal contamination and apparatus for removing metal contamination
Dec 21, 15
Jan 23, 18
[C23C, H01J, H01L]
9875916
Method of stripping photoresist on a single substrate system
Nov 06, 12
Jan 23, 18
[G03F, H01L]
9869941
Substrate cleaning method, substrate cleaning apparatus, and computer-readable storage medium
Dec 14, 16
Jan 16, 18
[B08B, G03F, G01B, H01L]
9870901
Method of producing processing condition of plasma processing apparatus, and plasma processing apparatus
May 04, 16
Jan 16, 18
[H01J, H01L]
9862007
Substrate liquid processing apparatus and method, and computer-readable recording medium with substrate liquid processing program recorded therein
Mar 24, 15
Jan 09, 18
[B24B, B08B, C11D, H01L, B01D]
9865454
Substrate processing apparatus and substrate processing method
Oct 24, 14
Jan 09, 18
[C23C, H01J, H01L]
9865483
Substrate liquid processing method, substrate liquid processing apparatus, and recording medium
Sep 11, 15
Jan 09, 18
[B08B, H01L]
9865499
Method and apparatus for gap fill using deposition and etch processes
Jun 17, 16
Jan 09, 18
[C23C, H01L]
- No Patents to Display
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2017/0025,308
METHOD OF CLEANING BOTTOM OF VIA HOLE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
ABAN
Mar 09, 16
Jan 26, 17
[H01L]
2016/0363,868
LINE PATTERN COLLAPSE MITIGATION THROUGH GAP-FILL MATERIAL APPLICATION
ABAN
Jul 29, 16
Dec 15, 16
[G03F]
2016/0336,201
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
ABAN
Jul 26, 16
Nov 17, 16
[B08B, H01L]
2016/0276,147
Silicon Nitride Film Forming Method and Silicon Nitride Film Forming Apparatus
ABAN
Mar 10, 16
Sep 22, 16
[C23C, H01L]
2016/0247,765
SEMICONDUCTOR DEVICE, PLATING METHOD, PLATING SYSTEM AND RECORDING MEDIUM
ABAN
Feb 19, 16
Aug 25, 16
[C23C, H01L]
2016/0189,963
DOPING METHOD AND SEMICONDUCTOR ELEMENT MANUFACTURING METHOD
ABAN
Dec 21, 15
Jun 30, 16
[H01L]
2016/0035,584
PLANARIZATION METHOD, SUBSTRATE TREATMENT SYSTEM, MRAM MANUFACTURING METHOD, AND MRAM ELEMENT
ABAN
Sep 04, 15
Feb 04, 16
[H01L]
2016/0035,604
Substrate Processing Device and Substrate Processing Device-Use Coupling Member
ABAN
Jan 31, 14
Feb 04, 16
[H01L, B25J]
- No Patents to Display
Top Inventors for This Owner
Upgrade to the Premium Level to View Top Inventors for this Owner. Learn More |
Inventor Name
Address
MATTERS
- No Inventor to Display
Free |
Premium |
Professional |
Enterprise |
Patent Searching | ![]() |
![]() |
![]() |
![]() |
|||
Technology Searching | ![]() |
![]() |
![]() |
![]() |
|||
Owner and Inventor Searching | ![]() |
![]() |
![]() |
![]() |
|||
Patent Analytics | ![]() |
![]() |
![]() |
![]() |
|||
Owner Analytics | ![]() |
![]() |
![]() |
![]() |
|||
Attorney Analytics | ![]() |
![]() |
![]() |
![]() |
|||
Inventor Analytics | ![]() |
![]() |
![]() |
![]() |
|||
Technology Analytics | ![]() |
![]() |
![]() |
![]() |
|||
Mobile Searching | ![]() |
![]() |
![]() |
![]() |
|||
Tagging | ![]() |
![]() |
![]() |
||||
Advanced Patent Analytics | ![]() |
![]() |
![]() |
||||
Advanced Owner Analytics | ![]() |
![]() |
![]() |
||||
Mobile Portfolio/Analytics | ![]() |
![]() |
![]() |
||||
Detailed Attorney Information | ![]() |
![]() |
|||||
Prosecution analytics | ![]() |
![]() |
|||||
Pre-publication Data | ![]() |
![]() |
|||||
Monthly PAIR Information and Watches | ![]() |
![]() |
|||||
Number of patents in all portfolios | 100 (maximum) | 1000 (maximum) | 2000 (maximum) | Unlimited | |||
Watches in all categories (Watch) | 20 (maximum) | 10 (maximum) | 50 (maximum) | 500 (maximum) | Unlimited | ||
Maximum number of portfolios | 5 (maximum) | 10 (maximum) | 100 (maximum) | Unlimited | |||
Maximum number of comparisons | 1 (maximum) | 5 (maximum) | 20 (maximum) | Unlimited |
FREE |
$9.95/mo |
$39.95/mo |
$99.95/mo |
||||
PAIR Watch Weekly Update | $2.75/mo/patent | $2.65/mo/patent | |||||
PAIR Watch Daily Update | $5.75/mo/patent | $5.65/mo/patent | |||||
Trial Version | Trial Version | Trial Version | |||||
Current Plan Upgrade Now | Current Plan Upgrade Now | Current Plan Upgrade Now | Current Plan Upgrade Now |
We are sorry but your current membership does not allow you access to this feature. Upgrade to our Premium Level to View Top Owners in Class/Subclass! Learn More |